•
•
•
® FCM
RS-485
SM-A49916
SM-358642
SM-A49916
i 2021-08-11
® FCM RS-485
•
•
SM-A49916
ii 2021-08-11
ISO 4414JIS B 8370JFPS 2008()
3
SM-A49916
iii 2021-08-11
(
)
•
•
•
•
OFF
•
•
SM-A49916
iv 2021-08-11
()
FCM
050
(
OFF )
•
•
• ()
()
• JIS B 8392-12012(ISO 8573-12010)1:1:11:6:2
• ()
()()
()
<>
•
•
SM-A49916
v 2021-08-11
( OFF )
20°C1(101kPa) 65%RH
SM-A49916
vi 2021-08-11
.............................................................................................................................. i
............................................................................................... ii
.................................................................................................... iii
............................................................................................ iii
.................................................................................................... v
................................................................................................................................... vi
1. ..................................................................................................................... 1
1.1 .............................................................................................................. 1
1.1.1 ............................................................................................... 1
1.1.2 ...................................................................................... 2
1.1.3 ................................................................................................ 3
1.2 ..................................................................................................................... 4
1.2.1 ............................................................................................... 4
1.2.2 ...................................................................................... 7
1.3 .............................................................................................................. 9
1.3.1 General .......................................................................................................... 9
1.3.2 .................................................................................... 10
1.3.3 ............................................................................................. 13
1.3.4 ..................................................................................................... 14
1.4 ............................................................................................................ 19
1.4.1 ........................................................................................... 19
1.4.2 .................................................................................. 20
1.5 ............................................................................................................ 23
1.5.1 ........................................................................... 25
2. ....................................................................................................................... 26
2.1 ............................................................................................................ 26
2.2 ............................................................................................................ 28
2.3 ............................................................................................................ 29
2.3.1 ................................................................................................... 29
2.3.2 ....................................................................................................... 29
2.3.3 ...................................................................................................... 29
2.3.4 .......................................................................................................... 30
2.4 ............................................................................................................ 31
2.4.1 D .............................................................................................. 33
2.4.2 ...................................................................................................... 34
2.4.3 .......................................................................... 35
3. ................................................................................................................... 39
3.1 RS-485 ...................................................................................................... 41
3.2 ............................................................................................................ 43
3.2.1 ........................................................... 43
3.2.2 ............................................................ 46
3.2.3
() ......................................... 48
3.2.4 RS-485 (RS-485 ) ............................... 49
SM-A49916
vii 2021-08-11
3.2.5 ............................................................. 51
3.3 ............................................................................................................ 53
3.3.1 ........................................................................................ 53
3.3.2 ........................................................ 55
3.3.3 () ............................................ 57
3.3.4 ON .............................................................. 58
3.4 ............................................................................................... 60
3.4.1 ................................................................................ 60
3.4.2 ............................................................................ 62
3.5 ......................................................................................................... 64
4. ............................................................................................... 69
4.1 .................................................................................. 69
4.2 ........................................................................................................ 72
5. ................................................................................................................... 73
5.1 RS-485 ................................................................................. 73
5.2 RS-485 ................................................................................ 74
6. ................................................................................................................... 75
6.1 ............................................................................................................ 75
6.2 ............................................................................................................ 75
SM-A49916 1.
1 2021-08-11
1.
1.1
1.1.1
FCM
9500
AI
-
H6
R
AN
R
1
T
-
()
AI
AR
O2
LN
C1
C3
9500
00.5L/min
0001
01L/min
0002
02L/min
0005
05L/min
0010
010L/min
0020
020L/min
0050
050L/min
0100
0100L/min
()
L9500
(
)
00.5L/min
L0001
01L/min
L0001
02L/min
L0005
05L/min
L0010
010L/min
()
AI
AR
O2
()
LN
(13A)
C1
(CH4)
C3
(C3H8)
()
AI
AR
O2
LN
C1
C3
H6
(
6
)
( 50100L/min )
H8
(
8
)
8A
Rc1/4
UF 1
9/16-18UNF
()
R
RS-485
()
AN
15V (NPN)
AP
15V (PNP)
SN
(NPN)(NPN)
SP
(PNP)(PNP)
()
R
() 2
1
15 1m
3
15 3m
() 2
B
() 2
T
K
RC1
15 1m
RC3
15 3m
LB1
FCM-PC1,PC3
()
FCM-0001AI-H8RANR1BK
() 01L/min
()
()
(8)
() RS-485
() 15V
(NPN)
()
() 15 1m
()
()
()
()
()
()
()
()
()
()
FCM
RC1
-
B
1 9/16-18UNF 1.4
2 ()()()
SM-A49916 1.
2 2021-08-11
1.1.2
FCM-0002H2-8A1ANR1BK
() 02L/min
()
() Rc1/4
() RS-485
() 15V (NPN)
()
() 15 1m
()
()
H2
-
-
()
H2
HE
0002
02L/min
0005
05L/min
0010
010L/min
0020
020L/min
()
H2
HE
()
H2
HE
8A
Rc1/4
UF 1
9/16-18UNF
4S
1/4
2
4RM
1/4
JXR
()
R
RS-485
()
AN
15V (NPN)
AP
15V (PNP)
SN
(NPN)(NPN)
SP
(PNP)(PNP)
()
R
() 2
1
15 1m
3
15 3m
() 2
B
() 2
T
K
FCM
RC1
-
RC1
15 1m
RC3
15 3m
LB1
FCM-PC1,PC3
1 9/16-18UNF 1.4
2 ()()()
()
()
()
()
()
()
()
()
()
0002
8A
R
AN
R
1
B
T
FCM
SM-A49916 1.
3 2021-08-11
1.1.3
◼
FCM-LB1
◼ ( 15 )
FCM-RC1RC3
L
FCM-RC1
1000
15
FCM-RC3
3000
15
SM-A49916 1.
4 2021-08-11
1.2
1.2.1
FCM-[()][()]-[()] R [()] [()] [()] [()]
()
AI
()
AR
()
O2
()
LN
()
C1
()
C3
()
1
()
9500
500mL/min
0001
1L/min
0002
2L/min
0005
5L/min
0010
10L/min
0020
20L/min
0050
50L/min
0100
100L/min()
(
)
L9500
500mL/min
L0001
1L/min
L0002
2L/min
L0005
5L/min
L0010
10L/min
2
()
AI
AR
O2
()
LN
(13A) 3
C1
(CH4 100%)
C3
(C3H8 100%)
()
H6
(6)
( 50100L/min
)
H8
(8)
8A
Rc1/4
UF
9/16-18UNF
3100%F. S.
()
95000020
±5%F.S.0.5sec (TYP)
00500100
±5%F.S.1sec (TYP)
3%F.S.
1%F.S.
0.2%F.S./°C (25°C )
98kPa 1%F.S.()
()
H6/H8
490 kPa
8A/UF
980 kPa
050°C 90%RH ()
1 201 (101kPa) 65%
2
JIS B8392-12012(ISO 8573-12010)111162
()()
( 10)( 0.1mg/m3)
3 13A LNG (CH4)88%
SM-A49916 1.
5 2021-08-11
FCM-[()][()]-[()] R [()] [()] [()] [()]
()
4
R
RS-485 (Modbus RTU) 0-10 VDC(6.7k Ω) 0-5 VDC(10k Ω) 4-20 mADC(250 Ω)
4 (2 bit) ()
6
()
AN
1-5 V( 500k Ω )
50 mA 2.4 V
AP
1-5 V( 500k Ω )
50 mA 2.4 V
SN
50 mA 2.4 V
50 mA 2.4 V
SP
50 mA 2.4 V
50 mA 2.4 V
7 LED 3 1 digit
DC24V10%( 2%)
7
250 mA
()
H6/H8
8A/UF
()
H6/H8
200 g
8A/UF
480 g
IEC IP40
8
EMC
EN 55011EN 61000-6-2EN 61000-4-2/3/4/6/8
4 RS-485
(RS-485 )
ON/OFF
4-20mA
5 10V
6 1 KΩ
7 DC24V
8
5
SM-A49916 1.
6 2021-08-11
◼ 910
()
9500
0001
0002
0005
0010
0020
0050
0100
(
)
AI
(kPa)
50
100
100
100
100
150
200
300
(kPa)
20150
50200
50250
50250
50250
100300
150300
250350
(kPa)
150
200
250
250
250
300
300
350
AR
(kPa)
50
100
100
100
100
150
200
(kPa)
20150
50200
50250
50250
50250
100300
150300
(kPa)
150
200
250
250
250
300
300
O2
(kPa)
50
100
100
100
100
(kPa)
20150
50200
50250
50250
50250
(kPa)
150
200
250
250
250
LN/C1
(kPa)
50
50
50
50
50
(kPa)
20150
20150
20150
20150
30150
(kPa)
150
150
150
150
150
C3
(kPa)
50
50
50
50
50
(kPa)
20150
20150
20150
20150
30150
(kPa)
150
150
150
150
150
9 ()
10
()
◼
()
L9500
L0001
L0002
L0005
L0010
(
)
AI/O2
LN/C1
C3
11
(kPa)
20
20
20
20
20
(kPa)
550
550
550
550
1050
(kPa)
50
50
50
50
50
11 (12.5 kPa)
◼
()
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010
0020
0050
0100
0500
mL/min
0.001.00
L/min
0.002.00
L/min
0.005.00
L/min
0.010.0
L/min
0.020.0
L/min
0.050.0
L/min
0100
L/min
1mL/min
0.01L/min
0.01L/min
0.01L/min
0.1L/min
0.1L/min
0.1L/min
1L/min
12
999999mL
9999.99L
9999.99L
9999.99L
99999.9L
99999.9L
99999.9L
999999L
1mL
0.01L
0.01L
0.01L
0.1L
0.1L
0.1L
1L
5mL
0.01L
0.02L
0.05L
0.1L
0.2L
0.5L
1L
12 () OFF
SM-A49916 1.
7 2021-08-11
1.2.2
FCM-[()][()]-[()] R [()] [()] [()] [()]
()
(H2)
(HE)
1
()
0002
2L/min
0005
5L/min
0010
10L/min
0020
20L/min
2
()
H2
HE
()
8A
Rc1/4
UF
9/16-18UNF
4S
1/4 2
4RM
1/4 JXR
3100%F.S.
±5%F.S.0.5sec (TYP)
3%F.S.
1%F.S.
0.2%F.S./ °C (25°C )
98 kPa 1%F.S.()
980 kPa
050°C90%RH ()
3
110-6Pam3/s()
4
R
RS-485 (Modbus RTU) 0-10 VDC(6.7k Ω) 0-5 VDC(10k Ω) 4-20 mADC(250 Ω)
4 (2 bit) ()
6
()
AN
1-5 V( 500k Ω )
50 mA 2.4 V
AP
1-5 V( 500k Ω )
50 mA 2.4 V
SN
50 mA 2.4 V
50 mA 2.4 V
SP
50 mA 2.4 V
50 mA 2.4 V
7 LED3 1 digit
DC24V10%( 2%)
7
270 mA
1 20°C1(101 kPa)
2
3
4 RS-485
(RS-485 )
ON/OFF
4-20mA
5 10V
6 1KΩ
7 DC24V
5
SM-A49916 1.
8 2021-08-11
FCM-[()][()]-[()] R [()] [()] [()] [()]
()
()
8A/UF
480 g
4S/4RM
560 g
IEC IP40
8
EMC
EN 55011EN 61000-6-2EN 61000-4-2/3/4/6/8
8
◼ 910
()
0002
0005
0010
0020
(
)
H2
(kPa)
20
50
50
50
(kPa)
1050
3080
3080
3080
(kPa)
50
80
80
80
HE
(kPa)
50
100
100
100
(kPa)
20100
50150
50150
100150
(kPa)
100
150
150
150
9 ()
10
()
◼
()
0002
0005
0010
0020
0.002.00
L/min
0.005.00
L/min
0.010.0
L/min
0.020.0
L/min
0.01
L/min
0.01
L/min
0.1
L/min
0.1
L/min
11
9999.99L
9999.99L
99999.9L
99999.9L
0.01L
0.01L
0.1L
0.1L
0.02L
0.05L
0.1L
0.2L
11 () OFF
SM-A49916 1.
9 2021-08-11
1.3
1.3.1 General
◼
1
◼
0
◼ Modbus
(Coil)
2
(Input Status)
2
(Input Register)
16
(Holding Register)
16
◼
0x03
Read Holding Register
(16bit)
0x06
Preset Single Register
0x10
Preset Multiple Register
0x08
Diagnostics
0x0000
RS-485
Modbus RTU
9.619.238.4 kbps
8
12
20m
1247
1 : N ( 31 )
D-SUB 15
SM-A49916 1.
10 2021-08-11
1.3.2
◼ 0x03 (Read Holding Register)
1 0x0022
116
1
35L/min(0x0DAC)
(HEX)
0x01
0x03
0x02
1()
0x0D
1()
0xAC
CRC(16 )
7
(HEX)
0x01
0x03
()
0x00
()
0x22
()
0x00
()
0x01
CRC(16 )
8
SM-A49916 1.
11 2021-08-11
◼ 0x06 (Preset Single Register)
2 0x0033 RS-4850x0DAC3500 (35L/min)
(HEX)
0x01
0x06
()
0x00
()
0x33
()
0x0D
()
0xAC
CRC(16 )
8
2
(HEX)
0x01
0x06
()
0x00
()
0x33
()
0x0D
()
0xAC
CRC(16 )
8
SM-A49916 1.
12 2021-08-11
◼ 0x10 (Preset Multiple Registers)
3 (12)
(HEX)
0x01
0x10
()
0x00
()
0x32
()
0x00
()
0x0C
0x18
1()
0x00
1()
0x02
2()
0x00
2()
0x00
12()
0x00
12()
0x01
CRC(16 )
33
3
(HEX)
0x01
0x10
()
0x00
()
0x32
()
0x00
()
0x0C
CRC(16 )
8
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/
