CKD FCMシリーズ(IO-Link) ユーザーマニュアル

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ユーザーマニュアル
󱠞󰇃󰉪
󱠞󰇃󰉪
󱜈󲸣󲷥󰫞󲷼󲷻󲸜󲷼󲶹󰊐󱠞󰇃󰉪󲸣󲷫󲷛󱠟󲸐󲷠󲷱󲷦󲷕󲶺
󰥊󲷼󲷼󱷶󲷪󲸜󱞱󱫚󲸀󲶹󰙁󰛞󲷠󲷛󱠟󲸐󲷠󲷱󲷦󲷕󲶺
󰊐󱠞󰇃󰉪󲸀󱝜󲷻󲷹󲷞󲷼󲷪󲷡󲷨󲷷󱠟󲸒󲸜󲸙󲷗󲷼󲶹󲷼󰻷󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰙷󱰟󲹂󲺂󲹗󲹼󲺋󲹸
󲹸󲹣󲹤󲹼󲺋® FCM 󲹆󲹹󲺋󲹉
IO-Link 󲹎󲸳󲹦
SM-A19060/3
SM-358642
SM-A19060/3 󲸀󲷩󲸒󲷼
i 2023-04-21
󲸀󲷩󲸒󲷼
󲷤󲷿󲷰󲸄󲸀󲶹󰵬󲷿󰙷󱰟󲹂󲺂󲹗󲹼󲺋󲹸󲷃󲹸󲹣󲹤󲹼󲺋® FCM 󲹆󲹹󲺋󲹉 IO-Link 󲹎󲸳󲹦󲷄󲸣󲷛󱤚󰗔󲸒󲷕󲷰󲷱󲷞󲸏󲷨
󲷷󲶹󱠕󲷼󲷓󲸛󲷝󲷹󲷗󲷥󲷧󲷕󲸏󲷪󲶺󰊐󱠞󰇃󰉪󲸀󰊐󱜈󲷿󱈠󲸣󲷼󰯏󰁺󲷦󲷬󲸜󲷰󲸒󲷼󲶹󲶹󰫞󰆊󰘳󲷻
󲷺󲷿󰊐󰯘󲷻󱽰󲸣󱞱󱩖󲷨󲷰󲸓󲷿󲷸󲷪󲶺󲸙󲷠󲷛󱠟󲸐󲷕󲷰󲷱󲷞󲶹󰕈󲷨󲷠󲷥󰫞󲷠󲷱󲷦󲷕󲶺
󲷻󲷛󲶹󰊐󱠞󰇃󰉪󲸀󰿯󲷨󲷻󲷕󲸙󲷗󲷼󲶹󲷼󰻷󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰊐󱠞󰇃󰉪󲷼󱞱󱩖󲷿󰑞󲶹󱝼󲸀󲶹󰊷󲷻󲷠󰉧󲷪󲸜󲷤󲷹󲷝󲷓󲸛󲸏󲷪󲶺
󰊐󱜈󲸣󰫞󲷪󲸜󲷼󲷓󲷰󲷴󲷷󲶹󰊧󰅲󲸕󱯅󰻷󲶹󱻂󰖽󲶹󰒶󰑔󲷻󲷺󲸣󲸒󲷰󰸶󰖽󰒶󲷼󲷵󲷕󲷷󲷿󰵐󰯘󲷻
󰲲󱢒󲸣󲷴󲷰󲸣󱣠󲷼󲷨󲷷󲷕󲸏󲷪󲶺󰲲󱢒󲸣󲷰󲷻󲷕󲸕󲷻󱞬󱂏󲸣󲷢󲷷󲷕󲷻󲷕󲷝󱭆󲶹󰫞
󲷨󲷷󱥴󲷤󲷨󲷰󰄿󲷼󱷶󲷨󲷷󲸀󲶹󰵬󲸀󱤑󲸣󱤈󲷕󲸏󲷬󲸤󲶺
󲷛󰑞󲷼󲸙󲷴󲷷󰫞󲷦󲸝󲸜󰫞󱫶󲸀󰸁󰑞󲷼󲸠󲷰󲸜󲷰󲸒󲶹󰵬󲷸󲸀󲷮󲸝󲸚󲷿󲷪󲸊󲷷󲸣󰁲󲷪󲸜󲷤󲷹󲷝󲷸󲷞
󲸏󲷬󲸤󲶺󰫞󱫶󲶹󰫞󰘳󲷼󲸙󲷴󲷷󲸀󰙷󲶹󱯅󰻷󲶹󲷮󲷿󲷿󰊳󲷼󲸙󲸛󱈠󲷝󰯏󰁺󲷸󲷞󲷻󲷕󲸕󰄿󲷼󲷵󲷻
󲷝󲸜󲷝󲷓󲸛󲸏󲷪󲶺󰫞󱫶󲶹󰫞󰘳󲷼󲷓󲸠󲷬󲷷󲷛󰑞󲷿󱤑󲷸󲶹󱜈󲷿󰑞󲷿󰴝󱠇󲶹󰫞󰆊󰘳󲷿󰗵󲸣
󱚝󲷴󲷷󲷠󲷱󲷦󲷕󲶺
SM-A19060/3 󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼
ii 2023-04-21
󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼
󰊐󱜈󲸣󰫞󲷨󲷰󱛧󱄩󲸣󱟀󱞤󲶹󱜈󲷪󲸜󲸀󲶹󲷻󱛧󱄩󲸣󱜈󲷪󲸜󱅐󲷝󲷓󲸛󲸏󲷪󲶺󲷮󲷿󲷰󲸒󲷼󲸀󲶹󱛧󱄩
󲷿󰒶󰎕󰒶󰑔󲷹󲶹󰸶󰖽󱦱󲸏󲷰󲸀󰗉󱦱󲶹󲷤󲸝󲸚󲸣󱻂󰖽󲷪󲸜󲹆󲹈󲹕󲹯󲷿󲷝󰴝󲷸󲷞󲸜󲷤
󲷹󲸣󰴝󱠇󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󱛧󱄩󲷿󱟀󱞤󲶹󰻷󰨯󲷻󲷺󲷼󱷶󲷪󲸜󲷼󲷵󲷕󲷷󲸀󲶹󱝥󰍂󲶹󰘳󱝥󲷻󲷺󲸣󲷫󲷛󲸛󲷠󲷱󲷦󲷕󲶺
ISO 4414󲶹JIS B 8370󲶹JFPS 2008(󱝥󰍂󲷿󰉲󰆃󰤨)
󲃘󲸻󲹈󰘳󲸕󱚩󰫖󰘳󲶹󲷮󲷿󲷿󱝥󲶹󱝥󰍂󲶹󰘳󱝥󲷻󲷺
󰵬󱜈󲸣󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼󲸀󲶹󱜈󲷿󱭆󲶹󰫞󲶹󲷕󲶹󰻷󰨯󲸣󱬻󲷼󱚝󲷗󲷤󲷹󲷝󱰝󱝜󲷸
󲷪󲶺
󱛧󱄩󲷿󰴝󲷿󲷰󲸒󲷼󲶹󰊐󱠞󰇃󰉪󲷼󱞱󱩖󲷿󱢚󲶹󰙁󱽰󲸣󲷫󲷛󲸛󲷠󲷱󲷦󲷕󲶺
󰊐󱜈󲷼󲸀󲷦󲸏󲷧󲸏󲷻󰻈󲸣󰆌󲷨󲷷󲷕󲸏󲷪󲷝󲶹󲷛󰑞󲷿󱠘󲷴󲷰󲷕󲷼󲸙󲷴󲷷󰄿󲷼󲷵󲷻󲷝󲸜󲷝󲷓󲸛
󲸏󲷪󲶺󲷮󲷿󲸙󲷗󲷻󲷤󲷹󲷝󲷻󲷕󲷰󲸒󲷼󲸓󲶹
󲷫󰊐󱠞󰇃󰉪󲸣󰣎󱠟󲷨󲶹󲸣󲷼󰨯󱞏󲷨󲷰󲷗󲷙󲷸󲷥󰫞󲷠󲷱󲷦󲷕󲶺
󰙁󱽰󲸀󲶹󰂇󲷿󲷞󲷦󲷹󰯏󰫖󲷿󱈠󲷿󰷭󲸣󰇃󰵨󲷪󲸜󲷰󲸒󲷼󲶹󲷃󱹥󲷄󲷃󱢚󲷄󲷃󰙁󲷄󲷿 3󲷵󲷼
󲷦󲸝󲷷󲷕󲸏󲷪󲶺
󱹥
󱠘󲷴󲷰󲷕󲸣󲷪󲸜󲷹󲶹󲷝󰕛󲷪󲸜󲶹󲸏󲷰󲸀󱰝󲸣󱤈󲷗󱹥󲷝󱫖󲷴󲷷󰯏󰫖󲷪
󲸜󲷤󲷹󲷝󲷦󲸝󲸜󲸓󲷿󲶺
󱢚
󱠘󲷴󲷰󲷕󲸣󲷪󲸜󲷹󲶹󲷝󰕛󲷪󲸜󲶹󲸏󲷰󲸀󱰝󲸣󱤈󲷗󱈠󲷝󲷦󲸝󲸜󲸓
󲷿󲶺
󰙁
󱠘󲷴󲷰󲷕󲸣󲷪󲸜󲷹󲶹󲷝󲸣󱤈󲷗󲶹󲸏󲷰󲸀󰥁󰯘󰂇󲷝󰯏󰫖󲷪󲸜󱈠󲷝
󲷦󲸝󲸜󲸓󲷿󲶺
󲷻󲷛󲶹󲷃󰙁󲷄󲷼󱞱󱩖󲷨󲷰󱽰󲷸󲸓󲶹󰥨󰘤󲷼󲸙󲷴󲷷󲸀󱰝󲷻󱀗󰋞󲷼󱀗󲸄󲷠󱈠󲷝󲷓󲸛󲸏󲷪󲶺
󲷕󲷫󲸝󲸓󱰝󱝜󲷻󲸣󱞱󱩖󲷨󲷷󲷕󲸜󲷰󲸒󲶹󲷫󲷛󲸛󲷠󲷱󲷦󲷕󲶺
󲷮󲷿󲶹󱋢󰯘󲷻󰙁󱽰󲸕󰫞󲷿󲹡󲺂󲹗󲸣󲷿󲸱󲸳󲹂󲺂󲷸󱞱󱩖󲷨󲷷󲷕󲸏󲷪󲶺
󱋢󰯘󲷻󰙁󱽰󲸕󰫞󲷿󲹡󲺂󲹗󲸣󱚳󲷨󲸏󲷪󲶺
SM-A19060/3 󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼
iii 2023-04-21
󱜈󲷼󱷶󲷪󲸜󰙁󱽰
󱢚
󲷕󲸀󲷻󰲲󱢒󲷹󱀓󲂃󲸣󲷴󲷰󲷝󱚝󲷗󲶺
󰊐󱜈󲸀󲶹󱋢󰫙󰐘󰒶󰎕󰫞󱛧󱄩󲺊󱮋󲷹󲷨󲷷󱟀󱞤󲶹󱜈󱬁󲷦󲸝󲷰󲸓󲷿󲷸󲷪󲶺
󱜈󲷿󰑞󰼋󲷸󲷿󰫞󲸣󲸜󲶺
󱜈󰉸󲷿󰑞󲷸󲷿󰫞󲸀󲷸󲷞󲸏󲷬󲸤󲶺󲸏󲷰󲶹󱜈󲷿󰄶󱬁󲸕󱫤󲸀󱀰󲷼󱚝󲸠󲷻󲷕󲷸󲷠󲷱󲷦󲷕󲶺
󰊐󱜈󲸀󱋢󰫙󰐘󰒶󰎕󰫞󱛧󱄩󲺊󱮋󲷸󲷿󰫞󲸣󱬻󰫞󰼋󲷹󲷨󲷷󲷕󲸜󲷰󲸒󲶹󲶹󰔠󲷼󰵨󲷪󲸙󲷗󲷻󰊳󲺊
󰪕󲷸󰫞󲷪󲸜󲷼󲸀󱬻󰫞󲷹󲷦󲷬󲷷󲷕󲷰󲷱󲷞󲸏󲷪󲶺
(󲷥󰁈󰫞󲷼󱺀󲷨󰵬󲷼󲷥󰰧󱠰󲷕󲷰󲷱󲷞󲶹󰵬󱜈󲷿󰑞󲸣󲷥󱞏󲷕󲷰󲷱󲷕󲷰󲸀󱬻󰫞󲷼󲷻󲸛󲸏󲷪󲶺󲷰
󲷱󲷨󲶹󲷮󲷿󲷸󲸓󲶹󲷿󰄿󱺁󲷼󲷙󲷷󱹥󲸣󱭋󲷪󲸜󰻈󲸣󲷹󲷴󲷷󲷠󲷱󲷦󲷕󲶺)
󲸕󱱳󱬩󲶹󱋠󰸶󲶹󱋫󱋨󲶹󱨵󲶹󰮫󰒶󰎕󲶹󱿨󰅲󲺊󱿘󲷻󲷺󲷼󰰥󰁌󱞑󲸝󲸜󰒶󲸕󰫞󱫶󲷸󲷿󰫞󲶺
󰐧󰒶󲸕󱁮󱬾󰆀󱦱󲶹󲹦󲹻󲹈󰒶󰎕󲶹󲹥󲹻󲺋󲸼󱦱󲶹󰻈󰫞󲷻󲷺󲶹󲷝󱝜󰗔󲷦󲸝󲸜󰫞󱫶
󲷸󲷿󰫞󲶺
󲸕󱤉󰫙󲸉󲷿󲷞󲷻󱽫󲷝󲷦󲸝󲶹󰥊󲷼󲷝󱝜󰗔󲷦󲸝󲸜󰫞󱫶󲷸󲷿󰫞󲶺
󲸣󰴝󱠇󲷪󲸜󲸏󲷸󲸀󲶹󰊐󱜈󲷿󲷕󲶹󱯅󰻷󲺊󰒶󲷿󲷨󲸣󱀰󲷼󱚝󲸠󲷻󲷕󲶺
󰒶󰎕󲶹󱛧󱄩󲷿󰡭󰏩󲸕󰅛󲸀󲶹󰊐󱜈󲷝󱷶󲸠󲸜󲷪󲸊󲷷󲷿󲹆󲹈󲹕󲹯󲷿󲷝󰴝󲷦󲸝󲷷󲷕󲸜󲷤󲷹󲸣󰴝󱠇
󲷨󲷷󲷜󲸚󱚝󲷴󲷷󲷠󲷱󲷦󲷕󲶺󲸏󲷰󲶹󲸷󲹜󲹺󲸽󲺋󰜼󲷸󲷓󲸜󱀦󰸶󰖽󲸕󱀦󰗉󲶹󱟲󲷪󲸜󱟀󲷿󱻂󰜼󲸣 OFF
󲷼󲷨󲶹󲹆󲹈󲹕󲹯󲷿󱂱󰸶󰖽󲸀󰀽󰖽󲷨󲶹󰗉󰞄󲸝󲶹󰞄󱻂󲷼󰙁󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󱬡󱩀󰕇󰇭󲸓󲶹󲃘󰜃󱮋󲸕󱻂󱮋󲷝󲷪󲸜󱈠󲷝󲷓󲸜󲷰󲸒󲶹󰊐󱜈󲷿󲷕󲶹󱯅󰻷󲺊󰒶󲷿
󲷨󲸀󰙁󲷨󲷷󱚝󲷴󲷷󲷠󲷱󲷦󲷕󲶺
󰸶󰖽󰒶󲸣󰫞󲷨󲷰󰒶󰎕󲶹󱛧󱄩󲸣󱥴󲸏󲷰󲸀󱥴󲷪󲸜󲷼󲶹󱿖󲷨󱸶󰕇󱄩󲷻󲷺󲷼󲸙󲸛󲹆󲹈󲹕󲹯
󲷿󲷝󰴝󲷦󲸝󲷷󲷕󲸜󲷜󰴝󱠇󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰫞󰙷󲷼󱷶󲷪󲸜󰙁󱽰
󱹥
󰤀󰯏󱹉󰫻󲷼󲷓󲸜󲸻󲹈󲸣󰙷󲷦󲷻󲷕󲶺
󰤀󰯏󰄿󲷝󰯏󰫖󲷪󲸜󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺
󰣟󲸻󲹈󲸣󰙷󲷪󲸀󲶹󰹆󰿳󲶹󲸱󲹺󲹃󲺂󲷻󲷺󲷿󰙲󲸻󲹈󲷸󱯅󰻷󲷿󲸻󲹈󲸣󲹠󲺋󲹇󲷨󲷷󲷜󲸚󲷗󲶺
󰙲󲸻󲹈󲷼󲸙󲸜󲹠󲺋󲹇󲸣󱚝󲸠󲷫󲷼󰫞󲷪󲸜󲷹󲶹󰤀󰯏󰄿󲷝󰯏󰫖󲷪󲸜󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺
󱯠󰿳󲹱󲹖󲹺󲷼󲸀󲶹󱯠󰿳󲸻󲹈󲸣󰙷󲷦󲷻󲷕󲶺
󰯏󰡇󰄿󲷝󰯏󰫖󲷪󲸜󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺󲸏󲷰󲶹󱯠󰿳󲹱󲹖󲹺󲷸󲷓󲷴󲷷󲸓󲶹󲷸󲸓󱯠󰿳󲸻󲹈󲷿󲸻󲹈󲸣
󰙷󲷨󲷰󲸀󲶹󱯠󰿳󲸻󲹈󲷸󰫞󲷨󲷻󲷕󲷸󲷠󲷱󲷦󲷕󲶺
SM-A19060/3 󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼
iv 2023-04-21
󲹤󲸲󲹺󲹎
󲸹󲸳󲹺󲹮󲹈󲹗󲹤󲸲󲹺󲹎
(󲹭󲸳󲸾󲹼󲸷󲹻󲹒󲹄)
󲹻󲸽󲹴󲹻󲺋󲹎
󲸷󲸱󲹘󲹸󲸳󲹳
FCM 󲹆󲹹󲺋󲹉
󰸶󰖽󰜼
󱢚
󰫞󲷿󲹰󲺋󲹎󲷹󲷨󲷷󲸀󰫞󲷨󲷻󲷕󲶺
󰆦󰊐󲷿󱞤󱰟󰘳󲶹󲷛󲸙󲸄󱞤󱰟󰘳󲷹󰺽󲷿󲷿󰘳󲷼󲸀󱬻󲷨󲷷󲷕󲷻󲷕󲷰󲸒󲶹󲷼󲸀󰫞󲷨󲷻󲷕󲷸󲷠
󲷱󲷦󲷕󲶺
󰙷󰜃󲸀 0󲽛50󲥞󲷿󰼋󲷸󰫞󲷪󲸜󲶺
󰜃󰼋󲷸󲷓󲷴󲷷󲸓󰜃󲷝󰟮󲷼󲷨󲷷󱀗󱻣󲷝󰯏󰫖󲷪󲸜󲷸󲸀󰫞󲷨󲷻󲷕󲷸󲷠󲷱󲷦󲷕󲶺
󱬻󰫞󰙷󲷿󰙷󲸀󰫞󲷨󲷻󲷕󲶺
󰊐󱜈󲹆󲹹󲺋󲹉󲸀󲶹󰬓󲷼󱞱󱩖󲷿󲸻󲹈󰸁󰫞󰒶󲷸󲷪󲶺󱬻󰫞󰙷󲷿󰙷󲸣󰫞󲷨󲷰󲸀󲶹󰾮
󲶹󲷻󲷺󲷿󰑞󲸣󱟊󲷸󲷞󲸏󲷬󲸤󲶺󰥊󲷼󲶹󰗉󰿳󲸻󲹈󲸕󲹧󲹹󲸵󲹯󲸻󲹈󲷝󲶹󰗉󰿳󲶹󲹧󲹹󲸵󲹯󰫞󲷿󲹆
󲹹󲺋󲹉󲷿󱜈󲷼󰙷󲷪󲸜󲷹󲶹󲹊󲺂󲹄󲷿󱦱󲷝󲷞󲶹󲷨󲷻󲷠󲷻󲸜󲷝󲷓󲸛󲸏󲷪󲶺(󱦱󲷝󲷠
󲷹󲶹󱻂󰜼󲸣 OFF 󲷼󲷪󲸜󲸏󲷸󰙷󱰟󱞤󰜅󲶹󲷝󲷸󲷞󲷻󲷠󲷻󲸛󲸏󲷪󲶺)
󰙷󲷿󰛬󰙸󲷼󰙁󲷪󲸜󲶺
󰿳󲸕󰳳󲋥󲶹󱯠󲷻󲷺󲷿󱉊󱿘󲸣󲸏󲷻󲷕󰣲󰖽󲷸󲶹󲷜󲷵󲹏󲹈󲹗󲸕󲸹󲸳󲹺󲹮󲹈󲹗󲸣󲸏󲷻󲷕󰛬󰙸󰖽
󲸣󰫞󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰙷󲷿󱥂󲷼󲸙󲷴󲷷󲸀󲶹󰙷󲸣󱷘󰇭󱷬󰝬󰬄󲷦󲷬󲸜󲷹󱈠󲷼󱽫󲸣󲸍󲷪󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺󱯅󰻷
󲷿󰙷󲸣󱷘󰇭󱷬󲷨󲷻󲷕󲷸󲷠󲷱󲷦󲷕󲶺
󰊐󱜈󲷼󰬘󰥁(󱯅󰻷󲷿󲹃󲹮󲸕󰗉󰝳󲶹󲸹󲸳󲹺󲹮󲹈󲹗󲷻󲷺)󲷝󰙷󲷪󲸜󲷹󲶹󰾮󲸕󲷝󲷠󲷻󲷴󲷰󲸛󲶹
󰄿󱺁󲷪󲸜󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺󰬘󰥁󲷝󰙷󲷪󲸜󱈠󲷝󲷓󲸜󲷼󲸀󲶹󰊐󱜈󲷿󰔠(󰙷)󲷼󲹤󲸲
󲹺󲹎󲸕󲸷󲸱󲹘󲹸󲸳󲹳󲶹󲸹󲸳󲹺󲹮󲹈󲹗󲹤󲸲󲹺󲹎󲷻󲷺󲸣󲷢󲷷󲷠󲷱󲷦󲷕󲶺
󱂱󰸶󰖽󲸣󰫞󲷪󲸜󲸀󲶹JIS B 8392-1󲼗2012(ISO 8573-1󲼗2010)󲼸1:1:1󲽛1:6:2󲼺󲷿󰛬󰙸󰸶󰖽󲸣
󰫞󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󲹂󲺂󲹦󲹻󲹒󲹄󲷜󲸚󲷿󱂱󰸶󰖽󲷼󲸀󲶹󲹘󲹻󲺂(󰗉󲸕󱯠󲸹󲸳󲹺󲶹󰬘󰥁󲷻󲷺)󲷝󲸏󲸝󲷷󲷕󲸜󲷰󲸒󲶹󰊐󱜈󲷿
󰔠(󰙷)󲷼󲹤󲸲󲹺󲹎󲸕󲸷󲸱󲹘󲹸󲸳󲹳󲶹󲸹󲸳󲹺󲹮󲹈󲹗󲹤󲸲󲹺󲹎(󲹭󲸳󲸾󲹼󲸷󲹻󲹒󲹄)󲸣󲷢󲷷󰫞󲷨󲷷󲷠
󲷱󲷦󲷕󲶺
󲷻󲷛󲶹󰊐󱜈󲷿󲹰󲹒󲹆󲹴(󱰡󱁚)󲸀󲶹󱯅󰻷󲷿󰙷󲸝󲸣󰅛󰙷󲷪󲸜󲷰󲸒󲷿󲸓󲷿󲷸󲶹󰙷󲷨󲷰󰬘󰥁󲸣󱹗󲷠󲷤󲷹
󲸀󲷸󲷞󲸏󲷬󲸤󲶺
<󰁏󱦱>
󰙷󲷿󲷝󰼋󲷸󲷓󲸜󲷤󲷹󲸣󰴝󱠇󲷿󲷗󲷙󲶹󰫞󲷪󲸜󲶺
󱆐󲸣󱥹󲷙󲷷󲷕󲷰󲸛󲶹󲷿󰥨󲷸󲷿󰫞󲸀󰄿󱺁󲷿󲷼󲷻󲸛󲸏󲷪󲶺
󰔠󲷝󲷜󲷴󲷰󲸛󲶹󰔠󲷿󲷝󲃘󲷕󲷹󲶹󲷝󲸝󲷻󲷠󲷻󲸛󰙷󲷝󰙷󲸝󲸏󲷬󲸤󲶺
󰔠󲷿󲹻󲸽󲹴󲹻󲺋󲹎󲷿󰙷󱰟󰥊󲸣󰴝󱠇󲷪󲸜󲶺
󲹻󲸽󲹴󲹻󲺋󲹎󲷿󰙷󱰟󰥊󲷼󲸙󲷴󲷷󲸀󲶹󰙷󱰟󲸣󰙷󲷨󲷰󲷹󲷞󲷼󲷝󲷬󲷫󲶹󰊐󱜈󲷿󲷝󲸆󲸚󲷵󲷠
󲷝󲷓󲸛󲸏󲷪󲶺
󰊐󱜈󲷿󰔠󲷼󲹟󲹺󲹥󲸣󰫞󲷪󲸜󲸀󲶹󰶘󰘝󰑞󲷿󲹟󲹺󲹥󲸣󰫞󲷨󲶹󲹤󲸲󲹺󲹎󲸣󲷢󲸜󲶺
󲹟󲹺󲹥󲷿󲸿󲹹󲺋󲹈󲶹󲸹󲸳󲹺󲷻󲷺󲷿󱿖󰅔󲸕󲶹󲹟󲹺󲹥󲷜󲸚󰯏󰫖󲷪󲸜󰂷󱆗󰾋󲷼󲸙󲸛󲶹󰊐󱜈󲷝󱠘󲷨󲷰󲸛󰄿
󱺁󲷪󲸜󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺
󲹦󲹼󲹠󲺂󲸻󲹈󲷻󲷺󲷿󰚯󲸻󲹈󲸀󲶹󰖽󲷦󲷬󲷷󲷜󲸚󰫞󲷪󲸜󲶺
󰚯󲷨󲷰󲸻󲹈󲷝󰊐󱜈󲷼󰙷󲸝󱪹󲸑󲷹󰄿󱺁󲷿󲷼󲷻󲸛󲸏󲷪󲶺
󲹟󲺋󲹙󲷿󰸶󰣟󰖛󲷼󰫞󲷪󲸜󲶹󱫬󰡇󲷿󰯏󰫖󲸣󱸶󲷟󲶹󲸏󲷰󱫬󰡇󲷝󰯏󰫖󲷨󲷰󲷹󲷞󲷸󲸓󰊐󱜈󲷼󱽫󲷝
󲸁󲷻󲷕󲸙󲷗󲷼󱟀󱞤󱼄󲷸󰻈󲷪󲸜󲶺
󲹟󲺋󲹙󲷿󱫬󰡇󲷼󲸙󲸜󱯅󰻷󲷿󰆽󲸕󰡇󰡗󲸀󲶹󰄿󱺁󲷿󲷼󲷻󲸛󲸏󲷪󲶺
SM-A19060/3 󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼
v 2023-04-21
󱢚
󰗉󰿳󲸻󲹈󲸕󲹧󲹹󲸵󲹯󲸻󲹈󲷹󲶹󲷮󲸝󲷿󲸻󲹈󲸣󰛤󲷦󲷬󲷷󰫞󲷪󲸜󲸀󲶹󲸻󲹈󲷿󰙷󲷼󰙁󲷪󲸜󲶺
󲷿󲸙󲷗󲷼󱦱󲷸󰫞󲷪󲸜󲷹󲷞󲶹󰗉󰿳󲸻󲹈󲸕󲹧󲹹󲸵󲹯󲸻󲹈󲷝󲶹󰗉󰿳󲶹󲹧󲹹󲸵󲹯󰫞󲷿󰊐󱜈󲹆
󲹹󲺋󲹉󲷼󰙷󲷪󲸜󲷹󲶹󲹊󲺂󲹄󲷿󱦱󲷝󲷞󲶹󲷨󲷻󲷠󲷻󲸜󲷝󲷓󲸛󲸏󲷪󲶺󰙷󲷨󲷻󲷕󰁑󱄩󲸣󲷨󲷷󲷠
󲷱󲷦󲷕󲶺(󱦱󲷝󲷠󲷹󲶹󱻂󰜼󲸣 OFF 󲷼󲷪󲸜󲸏󲷸󰙷󱰟󱞤󰜅󲶹󲷝󲷸󲷞󲷻󲷠󲷻󲸛󲸏󲷪󲶺)󲸏󲷰󲶹󲸻󲹈
󲸣󱬾󰆀󲷪󲸜󲷹󲷞󲷼󲸓󲶹󲸻󲹈󲷿󱫬󰙷󲸣󱸶󲷡󲷰󲸒󲶹󲷿󲸙󲷗󲷼󱬾󰆀󲸣󱟀󲷢󲶼󲷼󱬾󰆀󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󲷼󱷶󲷪󲸜󰙁󱽰
󰙁
󰗠󲸝󲷻󲷺󲸣󲸜󲷰󲸒󲷼󲶹󰝑󲸕󲸱󲹺󲹂󲺋󲹺󲶹󰙚󰙸󲷻󲷺󲸀󰫞󲷨󲷻󲷕󲶺
󲹀󲺋󲹈󲷿󰊧󱥂󲸀󰒟󱈢󲷸󲷪󲶺󰒟󱈢󲸣󲷪󲷛󲷮󲸝󲷝󲷓󲸛󲸏󲷪󲶺󱓨󲸒󲷰󰙚󲷸󲸵󲸷󲹈󲸣󰜶󲸚󲷬󲶹󲷠󱀡󲷴
󲷷󲷜󲸚󲷞󲷴󲷷󲷠󲷱󲷦󲷕󲶺
󰙷󱰟󰾮󲸣󰊈󰯘󲷼󰴝󱠇󲷪󲸜󲶺
󰊈󰯘󲷼󰙷󱰟󰾮󲸣󰴝󱠇󲷪󲸜󲷤󲷹󲸣󰁏󲷨󲸏󲷪󲶺󲷛󰑞󲷿󰫞󰪕󲸕󰫞󰥨󲷼󲸙󲸛󲶹󰾮󲷝󰊈󲷜󲸚
󲷪󲸜󲷝󲷓󲸛󲸏󲷪󲶺󲸏󲷰󲶹󱷘󰇭󱷬󰫞󲷪󲸜󲷹󲹊󲺂󲹄󲹐󲹒󲹦󲷿󲷼󲸙󲸛󲶹󰾮󲷝󲷪󲸜󲷝
󲷓󲸛󲸏󲷪󲶺
󰊐󱜈󲷼󱚳󰵨󲷦󲸝󲸜󰙷󱰟󲸀󱥂󱰟󰙷󱰟󲸣󰸛󰙷󱰟󲷼󰁯󰻭󲷨󲷰󲷸󲷪󲶺
󱞤󰜅󲷨󲷰󱥂󱰟󰙷󱰟󲸣 20°C󲶹1󰖽(101kPa)󲶹󰰧󰜶 65%RH 󲷸󲷿󰸛󰙷󱰟󲷼󰁯󰻭󲷨󲷷󱚳󰵨󲷨󲷷󲷕
󲸏󲷪󲶺
SM-A19060/3 󰰡󰔠
vi 2023-04-21
󰰡󰔠
󲸀󲷩󲸒󲷼 .............................................................................................................................. i
󲷼󲷥󰫞󲷕󲷰󲷱󲷠󲷰󲸒󲷼 ............................................................................................... ii
󱜈󲷼󱷶󲷪󲸜󰙁󱽰 .................................................................................................... iii
󰫞󰙷󲷼󱷶󲷪󲸜󰙁󱽰 ............................................................................................ iii
󲷼󱷶󲷪󲸜󰙁󱽰 .................................................................................................... v
󰰡󰔠 ................................................................................................................................... vi
1. 󱜈󰐬󱝜 ..................................................................................................................... 1
1.1 󰬓󱚳󰵨 .............................................................................................................. 1
1.1.1 󱋢󲸻󲹈󲹱󲹖󲹺 ............................................................................................... 1
1.1.2 󰗉󰿳󲶹󲹧󲹹󲸵󲹯󲹱󲹖󲹺 ...................................................................................... 2
1.1.3 󲸹󲹦󲹆󲹶󲺂󱮋 ................................................................................................ 3
1.2 󰑞 ..................................................................................................................... 4
1.2.1 󱋢󲸻󲹈󲹱󲹖󲹺 ............................................................................................... 4
1.2.2 󰗉󰿳󲶹󲹧󲹹󲸵󲹯󲹱󲹖󲹺 ...................................................................................... 7
1.3 󱫼󰑞 .............................................................................................................. 9
1.3.1 General .......................................................................................................... 9
1.3.2 On demand data .......................................................................................... 10
1.3.3 Parameter and commands ...........................................................................11
1.3.4 Process data IN ........................................................................................... 15
1.3.5 Process data OUT ....................................................................................... 16
1.3.6 Observation ................................................................................................. 17
1.3.7 Diagnosis ..................................................................................................... 18
1.4 󰘳 ............................................................................................................ 19
1.4.1 󰒟󱈢󲹫󲹖󲸲󲹎󲸳󲹦 ........................................................................................... 19
1.4.2 󲹈󲹕󲺂󲹻󲹈󲹫󲹖󲸲󲹎󲸳󲹦 .................................................................................. 20
1.5 󰒶󱈠󱠞󰇃 ............................................................................................................ 23
1.5.1 󱚳󰵨󲶹󰃰󱮋󲷿󰷡󲷹󰒶󱈠 ........................................................................... 25
2. 󲷢 ....................................................................................................................... 26
2.1 󱟀󱄩󰪕 ............................................................................................................ 26
2.2 󰆊󰘳 ............................................................................................................ 28
2.3 󱯅󰻷󰆊󰘳 ............................................................................................................ 29
2.3.1 󱯅󰻷󲷿󰛬󰀳 ................................................................................................... 29
2.3.2 󲹆󲺋󲹺 ....................................................................................................... 29
2.3.3 󱯅󰻷󰆊 ...................................................................................................... 29
2.3.4 󱁿󲷢 .......................................................................................................... 30
2.4 󱯅󱁻󰆊󰘳 ............................................................................................................ 31
2.4.1 M12 󲹂󲹜󲸾󲹎 ................................................................................................. 33
2.4.2 󱀗󱁻󰆊󰘳 ...................................................................................................... 34
3. 󰫞󰆊󰘳 ................................................................................................................... 35
3.1 󰙷󱰟 ............................................................................................................ 37
3.1.1 󲹏󲸳󲹻󲸾󲹗󲹰󲹱󲹹󰒶󱈠󲷸󰙷󱰟󲸣󲷪󲸜 ........................................................... 37
3.1.2 󲹦󲹹󲹊󲹒󲹗󰒶󱈠󲷸󰙷󱰟󲸣󲷪󲸜 ............................................................ 40
3.1.3 󲹆󲹶󲺋󲹗󲸺󲹒󲹗󲸼󲺋󲷼󲸙󲸜󱟀󰉧
(󲹏󲸳󲹻󲸾󲹗󲹰󲹱󲹹󲶹󲹦󲹹󲹊󲹒󲹗󰒶󱈠󰫞󰇭󲷿󲸐) .......................................... 42
3.1.4 󲹝󲺋󲹭󲹺󲹱󲺋󲹘󰒶󱈠󲷸󰙷󱰟󲸣󲷪󲸜(IO-Link 󱫼󲷿󲸐) ....................... 43
SM-A19060/3 󰰡󰔠
vii 2023-04-21
3.2 󰙷󱰟󰸛󰻭 ............................................................................................................ 45
3.2.1 󰸛󰻭󰙷󱰟󱚳󰵨󰆊󰘳 ........................................................................................ 45
3.2.2 󱟀󰸛󰻭󰙷󱰟󲷸󰖛󱻂󰴣󲸣󱷣󰕇󲷪󲸜 ........................................................ 47
3.2.3 󰸛󰻭󲹠󲹺󲹈󲸣󲷪󲸜 .................................................................................. 49
3.2.4 󱟀󰸛󰻭󰙷󱰟󲷸󲹈󲸳󲹒󲹐󲸣 ON 󲷪󲸜 .............................................................. 50
3.3 󲹈󲸳󲹒󲹐󰒶󱈠 ............................................................................................... 52
3.3.1 󱟂󲹱󲺋󲹘󲸣󰫞󲷪󲸜 ................................................................................ 52
3.3.2 󰼋󲹱󲺋󲹘󲸣󰫞󲷪󲸜 ............................................................................ 54
3.4 󰃰󲹤󲹼󲺋 ......................................................................................................... 56
4. 󲹗󲹸󲹥󲹺󲹆󲹴󲺋󲹕󲸲󲺂󲸿 ............................................................................................... 63
4.1 󲹗󲹸󲹥󲹺󲷿󲷹󱄩󰆊󰘳 .................................................................................. 63
4.2 󲸷󲹸󲺋󲹂󲺋󲹘 ........................................................................................................ 65
5. 󱟊󱝥 ................................................................................................................... 66
5.1 󱟊󰊳 ............................................................................................................ 66
5.2 󱟊󰊈󱷬 ............................................................................................................ 66
SM-A19060/3 1. 󱜈󰐬󱝜
1 2023-04-21
1. 󱜈󰐬󱝜
1.1 󰬓󱚳󰵨
1.1.1 󱋢󲸻󲹈󲹱󲹖󲹺
󲸹󲹦󲹆󲹶󲺂󰬓
FCM
9500
AI
-
H6
C
R
S
T
-
󰒶󰸁󰬓
󱞱

(󲸳)󰙷󱰟󰼋
󱬻󰫞󰙷
AI
AR
O2
LN
C1
C3
9500
󰒇
󰜾
󳬗
󳫼
󳬯
0󲽛0.5L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0001
0󲽛1L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0002
0󲽛2L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0005
0󲽛5L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0010
0󲽛10L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0020
0󲽛20L/min
󲲄
󲲄
0050
0󲽛50L/min
󲲄
󲲄
0100
0󲽛100L/min
(󰒟󱈢󲹫󲹖󲸲󲷿󲸐)
󲲄
L9500
(
󳬑
󳬞
󳭊
󳭄
󳬑
󳫐
󳫡
)
󳬗
󳫼
󳬯
0󲽛0.5L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0001
0󲽛1L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0001
0󲽛2L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0005
0󲽛5L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0010
0󲽛10L/min
󲲄
󲲄
󲲄
󲲄
󲲄
(󲹼)󱬻󰫞󰙷
AI
󱂱󰸶󰖽󲶹󰹆󰿳
AR
󲸱󲹺󲹃󲺂
O2
󱯠󰿳(󰶘󰘝󰑞)
LN
󱮕󲸻󲹈(13A)
C1
󲹰󲹎󲺂(CH4)
C3
󲹦󲹼󲹠󲺂(C3H8)
(󲹞)󰁌󱁇󲶹󲹫󲹖󲸲󰊧󱥂
󰁌󱁇󲶹󲹫󲹖󲸲󰊧󱥂
AI
AR
O2
LN
C1
C3
H6
󲹾󲺂󲹎󲹒󲹐(󲟦
6
)󲶹󰒟󱈢󲹫󲹖󲸲
(󰙷󱰟󰼋50󲶹100L/min 󲸀󱹗󲷠)
󲲄
H8
󲹾󲺂󲹎󲹒󲹐(󲟦
8
)󲶹󰒟󱈢󲹫󲹖󲸲
󲲄
8A
Rc1/4
󲶹󲹈󲹕󲺂󲹻󲹈󲹫󲹖󲸲
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
UF 󰙁1
9/16-18UNF
󲶹󲹈󲹕󲺂󲹻󲹈󲹫󲹖󲸲
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
(󲹚)
C
IO-Link
(󲹪)󱚳󰵨󰆊
󰢔󱞱
󰕈󰆊
R
󱫬󰆊
(󲹧)󲹀󲺋󲹥󲹺 󰙁2
󰢔󱞱
󰢔󲷨
S
󲹈󲹗󲹻󲺋󲹗(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
L
L(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
M
󰤧󲹈󲹗󲹻󲺋󲹗(󲹰󲹈) 3m
(󲹗)󲹥󲹸󲹀󲹒󲹗 󰙁2
󰢔󱞱
󰢔󲷨
B
󲹥󲹸󲹀󲹒󲹗
(󲹐)󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲 󰙁2
󰢔󱞱
󰢔󲷨
T
󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲󱟊󰇃󰉪󲶹󰿕󲶹󰏩󰌞󱂽󰉪
K
󰏩󰌞󱂽󰉪
󰙁1󲼗 9/16-18UNF 󲷾󲷩󲷿󰥨󲷼󲷵󲷕󲷷󲸀󲶹󲣿1.4 󰘳󲤀󲸣󰢸󲷨󲷷󲷠󲷱󲷦
󲷕󲶺
󰙁2󲼗 (󲹧)(󲹗)(󲹐)󲸣󱭆󰇭󲸀󲶹󱜈󲷼󰛨󲷨󲷷󰿢󲷨󲸏󲷪󲶺
(󲸳)󰙷󱰟󰼋
(󲹼)󱬻󰫞󰙷
(󲹞)󰁌󱁇󲶹󲹫󲹖󲸲󰊧󱥂
(󲹚)
(󲹧)󲹀󲺋󲹥󲹺
FCM
MS3
-
󱞱

MS3
󲹈󲹗󲹻󲺋󲹗(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
ML3
L(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
MM3
󰤧󲹈󲹗󲹻󲺋󲹗(󲹰󲹈) 3m
LB1
󲹥󲹸󲹀󲹒󲹗
B
󲱕󰬓󱚳󰵨
FCM-0001AI-H8CRSBK
(󲸳)󰙷󱰟󰼋 󲼗0󲽛1L/min
(󲹼)󱬻󰫞󰙷 󲼗󱂱󰸶󰖽󲶹󰹆󰿳
(󲹞)
󰁌󱁇󲶹󲹫󲹖󲸲󰊧󱥂
󲼗󲹾󲺂󲹎󲹒󲹐(󲟦8)󲶹
󰒟󱈢󲹫󲹖󲸲
(󲹚) 󲼗IO−Link
(󲹪)󱚳󰵨󰆊 󲼗󱫬󰆊
(󲹧)󲹀󲺋󲹥󲹺 󲼗󲹈󲹗󲹻󲺋󲹗(󲹰󲹈)
/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈)3m
(󲹗)󲹥󲹸󲹀󲹒󲹗 󲼗󲹥󲹸󲹀󲹒󲹗
(󲹐)󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲 󲼗󰏩󰌞󱂽󰉪
(󲹪)󱚳󰵨󰆊
(󲹐) 󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲
(󲹗)󲹥󲹸󲹀󲹒󲹗
SM-A19060/3 1. 󱜈󰐬󱝜
2 2023-04-21
1.1.2 󰗉󰿳󲶹󲹧󲹹󲸵󲹯󲹱󲹖󲹺
󲱕󰬓󱚳󰵨
FCM-0002H2-8ACRSBK
(󲸳)󰙷󱰟󰼋 󲼗0󲽛2L/min
(󲹼)󱬻󰫞󰙷 󲼗󰗉󰿳
(󲹞)󰁌󱁇 󲼗Rc1/4
(󲹚) 󲼗IO-Link
(󲹪)󱚳󰵨󰆊 󲼗󱫬󰆊
(󲹧)󲹀󲺋󲹥󲹺 󲼗󲹈󲹗󲹻󲺋󲹗(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈)3m
(󲹗)󲹥󲹸󲹀󲹒󲹗 󲼗󲹥󲹸󲹀󲹒󲹗
(󲹐)󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲 󲼗󰏩󰌞󱂽󰉪
󲸹󲹦󲹆󲹶󲺂󰬓
H2
-
-
󰒶󰸁󰬓
󱞱

(󲸳)󰙷󱰟󰼋
󱬻󰫞󰙷
H2
HE
0002
0󲽛2L/min
󲲄
󲲄
0005
0󲽛5L/min
󲲄
󲲄
0010
0󲽛10L/min
󲲄
󲲄
0020
0󲽛20L/min
󲲄
󲲄
(󲹼)󱬻󰫞󰙷
H2
󰗉󰿳
HE
󲹧󲹹󲸵󲹯
(󲹞)󰁌󱁇
󰁌󱁇
H2
HE
8A
Rc1/4
󲲄
󲲄
UF 󰙁1
9/16-18UNF
󲲄
󲲄
4S
1/4
󲸳󲺂󲹐
2
󱰝󲷠󲷕󱪹󲸐󱁆
󲲄
󲲄
4RM
1/4
󲸳󲺂󲹐
JXR 󲸹󲹈󱁆
󲲄
󲲄
(󲹚)
C
IO-Link
(󲹪)󱚳󰵨󰆊
󰢔󱞱
󰕈󰆊
R
󱫬󰆊
(󲹧)󲹀󲺋󲹥󲹺 󰙁2
󰢔󱞱
󰢔󲷨
S
󲹈󲹗󲹻󲺋󲹗(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
L
L(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
M
󰤧󲹈󲹗󲹻󲺋󲹗(󲹰󲹈) 3m
(󲹗)󲹥󲹸󲹀󲹒󲹗 󰙁2
󰢔󱞱
󰢔󲷨
B
󲹥󲹸󲹀󲹒󲹗
(󲹐)󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲 󰙁2
󰢔󱞱
󰢔󲷨
T
󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲󱟊󰇃󰉪󲶹󰿕󲶹󰏩󰌞󱂽󰉪
K
󰏩󰌞󱂽󰉪
󰙁1󲼗 9/16-18UNF 󲷾󲷩󲷿󰥨󲷼󲷵󲷕󲷷󲸀󲶹󲣿1.4 󰘳󲤀󲸣󰢸󲷨󲷷󲷠󲷱󲷦
󲷕󲶺
󰙁2󲼗 (󲹧)(󲹗)(󲹐)󲸣󱭆󰇭󲸀󲶹󱜈󲷼󰛨󲷨󲷷󰿢󲷨󲸏󲷪󲶺
(󲸳)󰙷󱰟󰼋
(󲹼)󱬻󰫞󰙷
(󲹞)󰁌󱁇
(󲹚)
(󲹪)󱚳󰵨󰆊
(󲹧)󲹀󲺋󲹥󲹺
FCM
MS3
-
󱞱

MS3
󲹈󲹗󲹻󲺋󲹗(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
ML3
L(󲹰󲹈)/󲹈󲹗󲹻󲺋󲹗(󲸹󲹈) 3m
MM3
󰤧󲹈󲹗󲹻󲺋󲹗(󲹰󲹈) 3m
LB1
󲹥󲹸󲹀󲹒󲹗
0002
8A
C
R
S
B
T
FCM
(󲹐) 󲹗󲹻󲺋󲹄󲹢󲹹󲹕󲸲
(󲹗)󲹥󲹸󲹀󲹒󲹗
SM-A19060/3 1. 󱜈󰐬󱝜
3 2023-04-21
1.1.3 󲸹󲹦󲹆󲹶󲺂󱮋
󰫞󲹥󲹸󲹀󲹒󲹗
󰬓󲼗FCM-LB1
󲹀󲺋󲹥󲹺󲸹󲹦󲹆󲹶󲺂(M12 󲹈󲹗󲹻󲺋󲹗(󲹰󲹈) / M12 󲹈󲹗󲹻󲺋󲹗(󲸹󲹈))
󰬓󲼗FCM-MS3
󲹀󲺋󲹥󲹺󲸹󲹦󲹆󲹶󲺂(M12 L (󲹰󲹈) / M12 󲹈󲹗󲹻󲺋󲹗(󲸹󲹈))
󰬓󲼗FCM-ML3
󲹀󲺋󲹥󲹺󲸹󲹦󲹆󲹶󲺂(M12 󰤧󲹈󲹗󲹻󲺋󲹗(󲹰󲹈))
󰬓󲼗FCM-MM3
SM-A19060/3 1. 󱜈󰐬󱝜
4 2023-04-21
1.2 󰑞
1.2.1 󱋢󲸻󲹈󲹱󲹖󲹺
󰬓
󱽰󰰡
FCM-[(󲸳)][(󲹼)]-[(󲹞)]C
󲹟󲹺󲹥󲁒󰆊
󰖛󱻂󰴣 󱼁󱫼󱻂󰇭󲼗󱷣
󲹤󲹺󲹈󲹀󲺋󲹺󰙷󱰟
AI
(󰸶󰖽󲶹󰹆󰿳)
AR
(󲸱󲹺󲹃󲺂)
O2
(󱯠󰿳)
LN
(󱮕󲸻󲹈)
C1
(󲹰󲹎󲺂)
C3
(󲹦󲹼󲹠󲺂)
󰙷󱰟󰼋
󰙁1
(󲸳)
󰒇
󰜾
󳬗
󳫼
󳬯
9500
500mL/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0001
1L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0002
2L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0005
5L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0010
10L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
0020
20L/min
󲲄
󲲄
0050
50L/min
󲲄
󲲄
0100
100L/min(󰒟󱈢󲹫󲹖󲸲󲷿󲸐)
󲲄
(
󳬑
󳬞
󳭊
󳭄
󳬑
󳫐
󳫡
)
󳬗
󳫼
󳬯
L9500
500mL/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0001
1L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0002
2L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0005
5L/min
󲲄
󲲄
󲲄
󲲄
󲲄
L0010
10L/min
󲲄
󲲄
󲲄
󲲄
󲲄
󱬻󰫞󰙷
󰙁2
(󲹼)
AI
󱂱󰸶󰖽󲶹󰹆󰿳
󲲄
AR
󲸱󲹺󲹃󲺂
󲲄
O2
󱯠󰿳(󰶘󰘝󰑞)
󲲄
LN
󱮕󲸻󲹈(13A)󰙁3
󲲄
C1
󲹰󲹎󲺂(CH4 100%)
󲲄
C3
󲹦󲹼󲹠󲺂(C3H8 100%)
󲲄
󰁌󱁇󲶹
󲹫󲹖󲸲󰊧󱥂
(󲹞)
H6
󲹾󲺂󲹎󲹒󲹐(󲟦6)󲶹
󰒟󱈢󲹫󲹖󲸲
(󰙷󱰟󰼋 50󲶹100L/min
󲸀󱹗󲷠)
󲲄
H8
󲹾󲺂󲹎󲹒󲹐(󲟦8)󲶹
󰒟󱈢󲹫󲹖󲸲
󲲄
8A
Rc1/4󲶹󲹈󲹕󲺂󲹻󲹈󲹫󲹖󲸲
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄
UF
9/16-18UNF󲶹
󲹈󲹕󲺂󲹻󲹈󲹫󲹖󲸲
󲲄
󲲄
󲲄
󲲄
󲲄
󲲄

󰼋
3󲽛100%F. S.
󰻆󰇭󱷬
(󲸳)
9500󲽛0020
󱟀±5%F.S.󲷼0.5sec (TYP)
0050󲽛0100
󱟀±5%F.S.󲷼1sec (TYP)
󰾮
󲘽3%F.S.
󱃟󱫊󲷨󰾮
󲘽1%F.S.
󰜃󰥊
󲘽0.2%F.S./󲥞(25󲥞󰜾)
󰥊
98kPa 󲷓󲷰󲸛󲘽1%F.S.(󰒇󰜾󰜾)

󰑞
󰒇󰜾
󱚳󰢸
󰼋
󱚳󰢸
󰉲󲃘󰫞
󱚳󰢸
󱆐
(󲹞)
H6/H8
490kPa
8A/UF
980kPa
󰫞󰜃󲶹󰫞󰜶
0󲽛50󲥞󲶹90%RH (󱀗󱻣󰢔󲷞󲷤󲷹)
󰙁1󲼗 20󲥞󲶹1󰖽(101kPa)󲶹󰰧󰜶65%󲷸󲷿󰸛󰙷󱰟󲷼󰁯󰻭󲶺󲸏󲷰󲶹󲹤󲹺󲹈󲹀󲺋󲹺󲷹󲸀󰙷󱰟󰼋󲷿󰉲󰙷󱰟󲸣󲷨󲸏󲷪󲶺
󰙁2󲼗 󰿳󲸕󰳳󲋥󲶹󱯠󲷻󲷺󲷿󱉊󱿘󲸣󲸏󲷻󲷕󰣲󰖽󲷸󲶹󲷜󲷵󲹏󲹈󲹗󲸕󲸹󲸳󲹺󲹮󲹈󲹗󲸣󲸏󲷻󲷕󰛬󰙸󰖽󲸣󰫞󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󱂱󰸶󰖽󲸣󰫞󲷪󲸜󲸀󲶹JIS B8392-1󲼗2012(ISO 8573-1󲼗2010)󲼸1󲼗1󲼗1󲽛1󲼗6󲼗2󲼺󲷿󰛬󰙸󰸶󰖽󲸣󰫞󲷨󲷷󲷠󲷱󲷦󲷕󲶺󲹂󲺂󲹦󲹻󲹒󲹄󲷜󲸚
󲷿󱂱󰸶󰖽󲷼󲸀󲶹󲹘󲹻󲺂(󰗉󲸕󱯠󲸹󲸳󲹺󲶹󰬘󰥁󲷻󲷺)󲷝󲸏󲸝󲸏󲷪󲶺󰊐󱜈󲷿󰒶󱈠󲸣󱁕󲷪󲸜󲷰󲸒󲷼󲶹󰊐󱜈󲷿󰔠(󰙷)󲷼󲹤󲸲󲹺󲹎
󲸕󲸷󲸱󲹘󲹸󲸳󲹳(󰉲󱻣󰡭 10󲥞)󲶹󲸹󲸳󲹺󲹮󲹈󲹗󲹤󲸲󲹺󲹎(󰉲󰘝󰟱 0.1mg/m3)󲸣󲷢󲷷󲷠󲷱󲷦󲷕󲶺
󰙁3󲼗 󱮕󲸻󲹈 13A 󲸀LNG 󲷜󲸚󰫖󲷦󲸝󲷰󲹰󲹎󲺂(CH4)88%󲸻󲹈󲷼󲷪󲸜󲷸󲷪󲶺
SM-A19060/3 1. 󱜈󰐬󱝜
5 2023-04-21
󰬓
󱽰󰰡
FCM-[(󲸳)][(󲹼)]-[(󲹞)]C

C
IO-Link
󰙷󱰟
󱚳󰵨
󱚳󰵨󰆊󰘳
7󲹊󲸿󲹰󲺂󲹗 LED 3 󰍇󲶹󱚳󰵨󰾮󲼗󰾮󲘽1digit
󱚳󰵨󰼋󲶹󱚳󰵨󱞏󱈠
󱚳󰢸
󰸛󰻭󰒶󱈠
󱚳󰢸
󱻂󰜼
󱻂󰜼󱻂
DC24V󲘽10%(󲹹󲹒󲹦󲹺󰧢 1%󲷿󱻂󰜼)
󰚙󱤞󱻂󰙷 󰙁4
200mA (󲹬󲺋󲹗󲹎󲸳󲹦 A)

󱂫󲶹󰒔󱊭
󰁌󲸻󲹈󱮋󰊧󱥂
(󲹞)
H6/H8
󲹬󲹹󲸱󲹮󲹘󰒟󱈢󲶹󲹤󲹒󰿳󲹃󲹯󲶹󲹈󲹕󲺂󲹻󲹈󲶹󲸱󲹺󲹮󲹙󲶹󲹆󲹹󲹂󲺂󲶹󰫤
8A/UF
󲹈󲹕󲺂󲹻󲹈󲶹󲹤󲹒󰿳󲹃󲹯󲶹󲸱󲹺󲹮󲹙󲶹󲹆󲹹󲹂󲺂󲶹󰫤
󱥂󱰟
(󲹞)
H6/H8
󰿚200g
8A/UF
󰿚480g
󱢥󰑔󱬁
IEC 󱝥󰍂 IP40 󰰧
󱢥󱦱 󰙁5
󱻂󰜼󱫬󰁌󱢥
EMC 
EN 55011󲶹EN 61000-6-2󲶹EN 61000-4-2/3/4/6/8
󰙁4󲼗 IO-Link 󲹭󲹈󲹎󲷿󲼎󲹬󲺋󲹗󲷰󲸛󲷿󱻂󰙷󱀦󱈠󲷝󲷼󲷓󲸜󲸓󲷿󲸣󲷥󰫞󲷠󲷱󲷦󲷕󲶺
󰙁5󲼗 󰊐󱜈󲷿󱢥󱦱󲸀󰥊󲷿󱠘󰁌󱁇󲷼󲷨󲷷󲷿󲸐󰋞󲷝󲷓󲸛󲶹󲷓󲸚󲸗󲸜󱠘󰁌󱁇󲷜󲸚󱢥󲷸󲷞󲸜󲸠󲷢󲷸󲸀󲷓󲸛󲸏󲷬󲸤󲶺
SM-A19060/3 1. 󱜈󰐬󱝜
6 2023-04-21
󰒇󰜾󲹎󲸳󲹦󲼗 󰑞
󰙷󱰟󰼋 (󲸳)
9500
0001
0002
0005
0010
0020
0050
0100
󱬻
󰫞
󰙷
(
󳭅
)
AI
󰒇󰜾(kPa)
50
100
100
100
100
150
200
300
(kPa)
20󲽛150
50󲽛200
50󲽛250
50󲽛250
50󲽛250
100󲽛300
150󲽛300
250󲽛350
󰉲󲃘󰫞(kPa)
150
200
250
250
250
300
300
350
AR
󰒇󰜾(kPa)
50
100
100
100
100
150
200
(kPa)
20󲽛150
50󲽛200
50󲽛250
50󲽛250
50󲽛250
100󲽛300
150󲽛300
󰉲󲃘󰫞(kPa)
150
200
250
250
250
300
300
O2
󰒇󰜾(kPa)
50
100
100
100
100
(kPa)
20󲽛150
50󲽛200
50󲽛250
50󲽛250
50󲽛250
󰉲󲃘󰫞(kPa)
150
200
250
250
250
LN/C1
󰒇󰜾(kPa)
50
50
50
50
50
(kPa)
20󲽛150
20󲽛150
20󲽛150
20󲽛150
30󲽛150
󰉲󲃘󰫞(kPa)
150
150
150
150
150
C3
󰒇󰜾(kPa)
50
50
50
50
50
(kPa)
20󲽛150
20󲽛150
20󲽛150
20󲽛150
30󲽛150
󰉲󲃘󰫞(kPa)
150
150
150
150
150
󰙁6󲼗 󰒇󰜾󲸀󲶹󰊐󱜈󰌰󰕈󰇭󲷿󲷸󲷪󲶺(󰔠󰖽󱷥󰄻)
󰙁7󲼗 󲸀󲶹󰊐󱜈󲷝󰕈󲷼󲷪󲸜󲷰󲸒󲷼󱝜󲷻󲷸󲷪󲶺󰙷󱰟󰼋󲶹󱬻󰫞󰙷󲷼󲸙󲷴󲷷󰬘󲷻󲸛󲸏󲷪󲶺
󲷿󰉲󲸀󲶹󰔠󰖽󱷥󰄻󲷸󲹤󲹺󲹈󲹀󲺋󲹺󰙷󱰟󲸣󰙷󲷪󲷿󲷼󱝜󲷻󲷸󲷪󲶺
󰉲󲃘󰫞(󲷿󰉲)󲸀󲶹󰔠󲷿󰉲󲷸󲷪󲶺󲷤󲸝󲸙󲸛󲷞󲷕󲷝󰁄󲷜󲷴󲷰󲶹󲷝󲷼󲷻󲷴󲷰󲸛󲶹󰉲
󰙷󱰟󲷝󲷸󲷞󲷻󲷠󲷻󲸛󲸏󲷪󲶺
󲹎󲸳󲹦󲼗 󰑞
󰙷󱰟󰼋 (󲸳)
L9500
L0001
L0002
L0005
L0010
󱬻
󰫞
󰙷
(
󳭅
)
AI/O2
LN/C1
C3
󰙁8
󰒇󰜾(kPa)
20
20
20
20
20
(kPa)
5󲽛50
5󲽛50
5󲽛50
5󲽛50
10󲽛50
󰉲󲃘󰫞(kPa)
50
50
50
50
50
󰙁8󲼗 󱮕󲸻󲹈󲷿󲹸󲸳󲺂(12.5kPa)󲷸󲸀󰼋󲷼󲷻󲸛󲸏󲷪󲶺
󰙷󰫞󱚳󰵨󲶹󰸛󰻭󰒶󱈠
󰙷󱰟󰼋 (󲸳)
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010
0020
0050
0100
󰙷󱰟󱚳󰵨
󱚳󰵨󰼋
0󲽛500
mL/min
0.00󲽛1.00
L/min
0.00󲽛2.00
L/min
0.00󲽛5.00
L/min
0.0󲽛10.0
L/min
0.0󲽛20.0
L/min
0.0󲽛50.0
L/min
0󲽛100
L/min
󱚳󰵨󱞏󱈠
1mL/min
0.01L/min
0.01L/min
0.01L/min
0.1L/min
0.1L/min
0.1L/min
1L/min
󰸛󰻭󰒶󱈠
󰙁9
󱚳󰵨󰼋
999999mL
9999.99L
9999.99L
9999.99L
99999.9L
99999.9L
99999.9L
999999L
󱚳󰵨󱞏󱈠
1mL
0.01L
0.01L
0.01L
0.1L
0.1L
0.1L
1L
󲹠󲹺󲹈󲹻󲺋󲹗
5mL
0.01L
0.02L
0.05L
0.1L
0.2L
0.5L
1L
󰙁9󲼗 󰸛󰻭󰙷󱰟󲸀󱞤󰻭(󱆄)󲷸󲷪󲶺󲸏󲷰󲶹󱻂󰜼󲸣 OFF 󲷼󲷪󲸜󲷹󲹹󲹊󲹒󲹗󲷦󲸝󲸏󲷪󲶺
󱻂󰜼󰇭󲷜󲸚󰙷󱰟󰸛󰻭󲸣󲹈󲹎󲺋󲹗󲷦󲷬󲸜󲸀󲶹Process Data OUT 󲷿󲣿󰸛󰻭󲹈󲹗󲹒󲹦󲤀󲶹󲣿󰸛󰻭󲹹󲹊󲹒󲹗󲤀󲹢󲹒󲹗󲸣󲣿0󲤀󲷼󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰙁6󲶹7
SM-A19060/3 1. 󱜈󰐬󱝜
7 2023-04-21
1.2.2 󰗉󰿳󲶹󲹧󲹹󲸵󲹯󲹱󲹖󲹺
󰬓
󱽰󰰡
FCM-[(󲸳)][(󲹼)]-[(󲹞)]C
󲹟󲹺󲹥󲁒󰆊
󰖛󱻂󰴣 󱼁󱫼󱻂󰇭󲼗󱷣
󲹤󲹺󲹈󲹀󲺋󲹺󰙷󱰟
󰗉󰿳(H2)
󲹧󲹹󲸵󲹯(HE)
󰙷󱰟󰼋
󰙁1
(󲸳)
0002
2L/min
󲲄
󲲄
0005
5L/min
󲲄
󲲄
0010
10L/min
󲲄
󲲄
0020
20L/min
󲲄
󲲄
󱬻󰫞󰙷
󰙁2
(󲹼)
H2
󰗉󰿳
󲲄
HE
󲹧󲹹󲸵󲹯
󲲄
󰁌󱁇
(󲹞)
8A
Rc1/4
󲲄
󲲄
UF
9/16-18UNF
󲲄
󲲄
4S
1/4 󲸳󲺂󲹐 2󱰝󲷠󲷕󱪹󲸐󱁆
󲲄
󲲄
4RM
1/4 󲸳󲺂󲹐 JXR 󲸹󲹈󱁆
󲲄
󲲄

󰼋
3󲽛100%F.S.
󰻆󰇭󱷬
󱟀±5%F.S.󲷼0.5sec (TYP)
󰾮
󲘽3%F.S.
󱃟󱫊󲷨󰾮
󲘽1%F.S.
󰜃󰥊
󲘽0.2%F.S./󲥞(25󲥞󰜾)
󰥊
98kPa 󲷓󲷰󲸛󲘽1%F.S.(󰒇󰜾󰜾)

󰑞
󰒇󰜾
󱚳󰢸
󰼋
󱚳󰢸
󰉲󲃘󰫞
󱚳󰢸
󱆐
980kPa
󰫞󰜃󲶹󰫞󰜶
0󲽛50󲥞󲶹90%RH (󱀗󱻣󰢔󲷞󲷤󲷹)
󱮋󰞄󲸝 󰙁3
1󲙣10-6Pa󲺊m3/s(󲹧󲹹󲸵󲹯󲹹󲺋󲸾󲹻󲺋󲹗)

C
IO-Link
󰙷󱰟
󱚳󰵨
󱚳󰵨󰆊󰘳
7󲹊󲸿󲹰󲺂󲹗 LED3 󰍇󲶹󱚳󰵨󰾮󲼗󰾮󲘽1digit
󱚳󰵨󰼋󲶹󱚳󰵨󱞏󱈠
󱚳󰢸
󰸛󰻭󰒶󱈠
󱚳󰢸
󱻂󰜼
󱻂󰜼󱻂
DC24V󲘽10%(󲹹󲹒󲹦󲹺󰧢 1%󲷿󱻂󰜼)
󰚙󱤞󱻂󰙷
󰙁4
220mA (󲹬󲺋󲹗󲹎󲸳󲹦 A)
󰙁1󲼗 20󲥞󲶹1󰖽(101kPa)󲷸󲷿󰸛󰙷󱰟󲷼󰁯󰻭󲶺󲸏󲷰󲶹󲹤󲹺󲹈󲹀󲺋󲹺󲷹󲸀󰙷󱰟󰼋󲷿󰉲󰙷󱰟󲸣󰵨󲷨󲸏󲷪󲶺
󰙁2󲼗 󰿳󲸕󰳳󲋥󲶹󱯠󲷻󲷺󲷿󱉊󱿘󲸣󲸏󲷻󲷕󰣲󰖽󲷸󲶹󲷜󲷵󲹏󲹈󲹗󲸕󲸹󲸳󲹺󲹮󲹈󲹗󲸣󲸏󲷻󲷕󰛬󰙸󰖽󲸣󰫞󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰙁3󲼗 󰊐󱜈󱮋󲷿󲸀󲶹󰞄󲸝󲷝󰢔󲷕󲷤󲷹󲷝󱝜󰗔󲷦󲸝󲸜󲹈󲹗󲹒󲹦󲷹󲷨󲷷󲸀󰫞󲷸󲷞󲸏󲷬󲸤󲶺󰑞󲶹󲷓󲸜󰷭󲷿󰞄󲸝󲸣󱟂󲷨󲷷󲷕󲸏󲷪󲶺
󰙁4󲼗 IO-Link 󲹭󲹈󲹎󲷿󲼎󲹬󲺋󲹗󲷰󲸛󲷿󱻂󰙷󱀦󱈠󲷝󲷼󲷓󲸜󲸓󲷿󲸣󲷥󰫞󲷠󲷱󲷦󲷕󲶺
SM-A19060/3 1. 󱜈󰐬󱝜
8 2023-04-21
󰬓
󱽰󰰡
FCM-[(󲸳)][(󲹼)]-[(󲹞)]C

󱂫󲶹󰒔󱊭
󰁌󲸻󲹈󱮋󰊧󱥂
󲹈󲹕󲺂󲹻󲹈󲶹󲹤󲹒󰿳󲹃󲹯󲶹󲸱󲹺󲹮󲹙󲶹󲹆󲹹󲹂󲺂󲶹󰫤
󱥂󱰟
(󲹞)
8A/UF
󰿚480g
4S/4RM
󰿚560g
󱢥󰑔󱬁
IEC 󱝥󰍂 IP40 󰰧
󱢥󱦱
󰙁5
󱻂󰜼󱫬󰁌󱢥
EMC 
EN 55011󲶹EN 61000-6-2󲶹EN 61000-4-2/3/4/6/8
󰙁5󲼗 󰊐󱜈󲷿󱢥󱦱󲸀󰥊󲷿󱠘󰁌󱁇󲷼󲷨󲷷󲷿󲸐󰋞󲷝󲷓󲸛󲶹󲷓󲸚󲸗󲸜󱠘󰁌󱁇󲷜󲸚󱢥󲷸󲷞󲸜󲸠󲷢󲷸󲸀󲷓󲸛󲸏󲷬󲸤󲶺
󰑞
󰙷󱰟󰼋 (󲸳)
0002
0005
0010
0020
󱬻
󰫞
󰙷
(
󳭅
)
H2
󰒇󰜾(kPa)
20
50
50
50
(kPa)
10󲽛50
30󲽛80
30󲽛80
30󲽛80
󰉲󲃘󰫞(kPa)
50
80
80
80
HE
󰒇󰜾(kPa)
50
100
100
100
(kPa)
20󲽛100
50󲽛150
50󲽛150
100󲽛150
󰉲󲃘󰫞(kPa)
100
150
150
150
󰙁6󲼗 󰒇󰜾󲸀󲶹󰊐󱜈󰌰󰕈󰇭󲷿󲷸󲷪󲶺(󰔠󰖽󱷥󰄻)
󰙁7󲼗 󲸀󲶹󰊐󱜈󲷝󰕈󲷼󲷪󲸜󲷰󲸒󲷼󱝜󲷻󲷸󲷪󲶺󰙷󱰟󰼋󲶹󱬻󰫞󰙷󲷼󲸙󲷴󲷷󰬘󲷻󲸛󲸏󲷪󲶺
󲷿󰉲󲸀󲶹󰔠󰖽󱷥󰄻󲷸󲹤󲹺󲹈󲹀󲺋󲹺󰙷󱰟󲸣󰙷󲷪󲷿󲷼󱝜󲷻󲷸󲷪󲶺
󰉲󲃘󰫞(󲷿󰉲)󲸀󲶹󰔠󲷿󰉲󲷸󲷪󲶺󲷤󲸝󲸙󲸛󲷞󲷕󲷝󰁄󲷜󲷴󲷰󲶹󲷝󲷼󲷻󲷴󲷰󲸛󲶹󰉲
󰙷󱰟󲷝󲷸󲷞󲷻󲷠󲷻󲸛󲸏󲷪󲶺
󰙷󱰟󱚳󰵨󲶹󰸛󰻭󰒶󱈠
󰙷󱰟󰼋 (󲸳)
0002
0005
0010
0020
󰙷󱰟󱚳󰵨
󱚳󰵨󰼋
0.00󲽛2.00
L/min
0.00󲽛5.00
L/min
0.0󲽛10.0
L/min
0.0󲽛20.0
L/min
󱚳󰵨󱞏󱈠
0.01
L/min
0.01
L/min
0.1
L/min
0.1
L/min
󰸛󰻭󰒶󱈠
󰙁8
󱚳󰵨󰼋
9999.99L
9999.99L
99999.9L
99999.9L
󱚳󰵨󱞏󱈠
0.01L
0.01L
0.1L
0.1L
󲹠󲹺󲹈󲹻󲺋󲹗
0.02L
0.05L
0.1L
0.2L
󰙁8󲼗 󰸛󰻭󰙷󱰟󲸀󱞤󰻭(󱆄)󲷸󲷪󲶺󲸏󲷰󲶹󱻂󰜼󲸣 OFF 󲷼󲷪󲸜󲷹󲹹󲹊󲹒󲹗󲷦󲸝󲸏󲷪󲶺
󱻂󰜼󰇭󲷜󲸚󰙷󱰟󰸛󰻭󲸣󲹈󲹎󲺋󲹗󲷦󲷬󲸜󲸀󲶹Process Data OUT 󲷿󲣿󰸛󰻭󲹈󲹗󲹒󲹦󲤀󲶹󲣿󰸛󰻭󲹹󲹊󲹒󲹗󲤀󲹢󲹒󲹗󲸣󲣿0󲤀󲷼󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󰙁6󲶹7
SM-A19060/3 1. 󱜈󰐬󱝜
9 2023-04-21
1.3 󱫼󰑞
1.3.1 General
󲹖󲹟󲸳󲹈 ID
󲹖󲹟󲸳󲹈 ID 󲸀󰙷󱰟󲹻󲺂󲹇󲷥󲷹󲷼󰬘󲷻󲸛󲸏󲷪󲶺
󲹖󲹟󲸳󲹈 ID
Product ID
󱆄
0x216001
FCM-9500-C
500mL/min 󲹻󲺂󲹇
0x216002
FCM-0001-C
1L/min 󲹻󲺂󲹇
0x216003
FCM-0002-C
2L/min 󲹻󲺂󲹇
0x216004
FCM-0005-C
5L/min 󲹻󲺂󲹇
0x216005
FCM-0010-C
10L/min 󲹻󲺂󲹇
0x216006
FCM-0020-C
20L/min 󲹻󲺂󲹇
0x216007
FCM-0050-C
50L/min 󲹻󲺂󲹇
0x216008
FCM-0100-C
100L/min 󲹻󲺂󲹇
󲤝IO-Link 󱟀󲹤󲸰󲸳󲹺󲼅IODD󲼆󲸀󰵬󲹪󲺋󲹯󲹩󲺋󲹇󲼅https://www.ckd.co.jp/)󲷜󲸚󲹏󲸵󲺂󲹼󲺋󲹘󲷨󲷷󲷠󲷱󲷦󲷕󲶺
󱽰󰰡
󱟳󰿾
󱽰󰰡
󱟳󰿾
󱫼󲹦󲹼󲹗󲹂󲹺
IO-Link
󰉲󲹄󲸳󲸾󲹺󲹎󲸳󲹯
2ms
󱫼󲹦󲹼󲹗󲹂󲹺 󲹟󲺋󲹇󲹶󲺂
V1.1
󲹖󲺋󲹎󲹈󲹗󲹻󲺋󲹇
1kbyte
󱫧󱬀
COM3(230.4kbps)
SIO 󲹱󲺋󲹘󲹄󲹬󲺋󲹗
󲷻󲷨
󲹬󲺋󲹗󲹎󲸳󲹦
A
󲹖󲹟󲸳󲹈 ID
󱞱󲷿󱚳󲸣󰢸
󲹦󲹼󲹊󲹈󲹖󲺋󲹎󱷘󲼅󲼆
10byte
󲹦󲹼󲹊󲹈󲹖󲺋󲹎󱷘󲼅󲼆
4byte
SM-A19060/3 1. 󱜈󰐬󱝜
10 2023-04-21
1.3.2 On demand data
Identification
󲹨󲺂󲹏 ID󲼗855(10 󱬎󰅙)/ 357(16 󱬎󰅙)
󲸳󲺂󲹖󲹒󲸾󲹈
󲹄󲹥
󲸳󲺂󲹖󲹒󲸾󲹈
󱽰󰰡
󲸱󲸾󲹊󲹈
󲹖󲺋󲹎󱷘
󲹤󲸸󲺋󲹭󲹒󲹗
0x0010
0
Vendor Name
CKD Corporation
R
64byte
String
0x0011
0
Vendor Text
https://www.ckd.co.jp/
R
64byte
String
0x0012
0
Product Name
FCM-0050󲼇-󲼇C
󰙁1
R
40byte
String
0x0013
0
Product ID
FCM-0050-C
󰙁1
R
64byte
String
0x0014
0
Product Text
Small Size Flow Controller
R
64byte
String
RapiFlow, 50L/min
󰙁1
0x0015
0
Serial- Number
󲼇󲼇󲼇󲼇-󲼇󲼇󲼇
󰙁2
R
16byte
String
0x0016
0
Hardware Revision
v1.0
󰙁1
R
64byte
String
0x0017
0
Firmware Revision
v2.0
󰙁1
R
64byte
String
0x0018
0
Application
Specific Tag
󲼇󲼇󲼇
R/W
32byte
String
R󲼗󱠟󲷨
R/W󲼗󱠟󲷨/󰉪󲷞󱪹󲸐
󰙁1 󱆄󲸣󰵨󲷪󲶺50L/min 󲸣󱚳󱞱󱩖󲷨󲷷󲷕󲸏󲷪󲶺
󰙁2 󲹆󲹹󲸱󲹺 No.󲷼󲷵󲷕󲷷
󲼇 󲼇 󲼇󲼇 󲼊 󲼇󲼇󲼇
󰒶󰸁󰖗󲷿󰙷󱰟󰼋
󰬓
󰲑󰇭󰙷󱰟
󰸛󰻭󰙷󱰟
󱚳󰵨
ProcessData
󱚳󰵨󰼋
ProcessData 
󰸛󰻭󱚳󰵨󰼋
󱚳󰵨
FCM-(L)9500*-*C
0󲽛500
0󲽛500.0 (mL/min)
0󲽛5000
0󲽛999999mL
0󲽛999999
FCM-(L)0001*-*C
0󲽛1.00
0.00󲽛1.000 (L/min)
0󲽛1000
0󲽛9999.99L
FCM-(L)0002*-*C
0󲽛2.00
0.00󲽛2.000 (L/min)
0󲽛2000
FCM-(L)0005*-*C
0󲽛5.00
0.00󲽛5.000 (L/min)
0󲽛5000
FCM-(L)0010*-*C
0󲽛10.0
0.0󲽛10.00 (L/min)
0󲽛1000
0󲽛99999.9L
FCM-0020*-*C
0󲽛20.0
0.0󲽛20.00 (L/min)
0󲽛2000
FCM-0050*-*C
0󲽛50.0
0.0󲽛50.00 (L/min)
0󲽛5000
FCM-0100*-*C
0󲽛100
0󲽛100.0 (L/min)
0󲽛1000
0󲽛999999L
(󱝚󰈻󲷿󰊏󰅙)
󰉷󲼗1󲽛9
X󲼗10 󰉷
Y󲼗11 󰉷
Z󲼗12 󰉷
󰆦󲼗01󲽛31
󱜈󱬁󰬓󲼗001󲽛999
SM-A19060/3 1. 󱜈󰐬󱝜
11 2023-04-21
1.3.3 Parameter and commands
󱫼󰑞
󳫼
󳭊
󳬟
󳬛
󳬇
󳬑
󳬍
󳬮
󳫼
󳭊
󳬟
󳬛
󳬇
󳬑
󱽰󰰡
󲸱󲸾󲹊󲹈
󲹖󲺋󲹎󱷘
󲹤󲸸󲺋󲹭󲹒󲹗
0x0002
0
System Command
󱞱󲷃󱚳 1󲷄󰢸
W
1byte
UInteger8
0x000C
0
Device Access Locks
0x0000󲼗󲹼󲹒󲸾󲷻󲷨
0x0001󲼗󲹠󲹸󲹰󲺋󲹎󲹼󲹒󲸾
0x0002󲼗󲹖󲺋󲹎󲹈󲹗󲹻󲺋󲹇󲹼󲹒󲸾
R/W
2byte
Record
0x0020
0
Error Count
0
R
2byte
UInteger16
0x0024
0
Device Status
0
R
1byte
UInteger8
0x0025
0
Detailed Devices Status
Diagnosis 󰢸
R
33byte
Array of 3
Octetstring
R󲼗󱠟󲷨
W󲼗󰉪󲷞󱪹󲸐
R/W󲼗󱠟󲷨/󰉪󲷞󱪹󲸐
󱚳1󲹆󲹈󲹕󲹯󲹂󲹭󲺂󲹘
󲹂󲹭󲺂󲹘

0x82
󱎵󰇭󱟀
Restore Factory Settings
󱟀󲸣󱎵󰥨󲷼󱟀󲷪󲸜
0xA0
󲹋󲹼󲸱󲹇󲹲󲹈󲹗
Zero Adjust Start
󰨨󲸣󲹋󲹼󰡭󲷹󲷨󲷷󱠫󰅛󲷪󲸜
0xA1
󲹋󲹼󲸱󲹇󲹲󲹈󲹗󲹹󲹊󲹒󲹗
Zero Adjust Reset
󲹋󲹼󰡭󱠫󰅛󲸣󰊈󲷼󲷪
SM-A19060/3 1. 󱜈󰐬󱝜
12 2023-04-21
󰑞
󳫼
󳭊
󳬟
󳬛
󳬇
󳬑
󳬍
󳬮
󳫼
󳭊
󳬟
󳬛
󳬇
󳬑
󱽰󰰡
󳬟
󳭏
󳬗
󳬑
󳬠
󳭄
󳭏
󳬐
󲸱󲸾󲹊󲹈
󲹖󲺋󲹎󱷘
󲹤󲸸󲺋󲹭󲹒󲹗
0x0100
0
󱬻󰫞󰙷
0󲼗AIR/ 1󲼗AR/ 2󲼗O2/ 3󲼗LN/
4󲼗CH4/ 5󲼗C3H8/
6󲼗H2/ 7󲼗He/
-
R
2byte
UInteger16
0x0101
0
󲽺󲽯󲽬󲽾 1(󱟂󲾐󲽭󲾁󲾛)
(Switch_Tolerance Mode)
ON/OFF 󱭆
1󲼗ON
0󲼗OFF
󲲀
R/W
2byte
UInteger16
0x0102
0
󲽺󲽯󲽬󲽾 1(󱟂󲾐󲽭󲾁󲾛)
(Switch_Tolerance Mode)
NO/NC 󱭆
0󲼗NO(Normally Open)
1󲼗NC(Normally Close)
󲲀
R/W
2byte
UInteger16
0x0103
0
󲽺󲽯󲽬󲽾 1(󱟂󲾐󲽭󲾁󲾛)
(Switch_Tolerance Mode)
󱹉
0 %F.S.
󱟀󰼋󲸀-50󲽛0%F.S.
󲲀
R/W
2byte
Integer16
0x0104
0
󲽺󲽯󲽬󲽾 1(󱟂󲾐󲽭󲾁󲾛)
(Switch_Tolerance Mode)
󱹉
0 %F.S.
󱟀󰼋󲸀 0󲽛50%F.S.
󲲀
R/W
2byte
Integer16
0x0105
0
󲽺󲽯󲽬󲽾 2(󰼋󲾐󲽭󲾁󲾛)
(Switch_Designated Range Mode)
ON/OFF 󱭆
1󲼗ON
0󲼗OFF
󲲀
R/W
2byte
UInteger16
0x0106
0
󲽺󲽯󲽬󲽾 2(󰼋󲾐󲽭󲾁󲾛)
(Switch_Designated Range Mode)
NO/NC 󱭆
0󲼗NO(Normally Open)
1󲼗NC(Normally Close)
󲲀
R/W
2byte
UInteger16
0x0107
0
󲽺󲽯󲽬󲽾 2(󰼋󲾐󲽭󲾁󲾛)
(Switch_Designated Range Mode)
󱹉
0 %F.S. 󰙁1
󱟀󰼋󲸀 0󲽛90%F.S.
󲲀
R/W
2byte
UInteger16
0x0108
0
󲽺󲽯󲽬󲽾 2(󰼋󲾐󲽭󲾁󲾛)
(Switch_Designated Range Mode)
󱹉
100 %F.S. 󰙁1
󱟀󰼋󲸀 10󲽛100%F.S.
󲲀
R/W
2byte
UInteger16
0x0109
0
󲽺󲽯󲽬󲽾 3(󰸛󰻭󲾇󲾜󲾖󲽺)
(Switch_Integarated Pulse)
ON/OFF 󱭆
1󲼗ON
0󲼗OFF
󲲀
R/W
2byte
UInteger16
0x010A
0
󲽺󲽯󲽬󲽾 3(󰸛󰻭󲾇󲾜󲾖󲽺)
(Switch_Integarated Pulse)
NO/NC 󱭆
0󲼗NO(Normally Open)
1󲼗NC(Normally Close)
󲲀
R/W
2byte
UInteger16
0x010B
0
󲽺󲽯󲽬󲽾 4(󱟀󰸛󰻭 ON)
(Switch_Integarated Flow)
ON/OFF 󱭆
1󲼗ON
0󲼗OFF
󲲀
R/W
2byte
UInteger16
0x010C
0
󲽺󲽯󲽬󲽾 4(󱟀󰸛󰻭 ON)
(Switch_Integarated Flow)
NO/NC 󱭆
0󲼗NO(Normally Open)
1󲼗NC(Normally Close)
󲲀
R/W
2byte
UInteger16
0x010D
0
󲽺󲽯󲽬󲽾 4(󱟀󰸛󰻭 ON)
(Switch_Integarated Flow)
󱟀
0 L
󱟀󰼋󲸀󲷃󱚳 2󲷄󲷼󲸙󲸜
󲲀
R/W
4byte
UInteger32
0x010E
0
󰸛󰻭󱊭󱬾󰆀󰒶󱈠
0󲼗OFF
1󲼗ON
󲲀
R/W
2byte
UInteger16
0x010F
0
󰸛󰻭󱊭󱬾󰆀󱟀
0 L
󱟀󰼋󲸀󲷃󱚳 2󲷄󲷼󲸙󲸜
󲲀
R/W
4byte
UInteger32
0x0110
0
󲸷󲹸󲺋󱊭󱬾󰆀󰒶󱈠
0󲼗OFF
1󲼗󲹟󲹺󲹥󱷣
2󲼗󲹟󲹺󲹥󱷥
󲲀
R/W
2byte
UInteger16
0x0111
0
󲸷󲹸󲺋󱸉󱟀
󲘽20 %F.S.
󱟀󰼋󲸀 5󲽛100%F.S.
󲲀
R/W
2byte
UInteger16
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CKD FCMシリーズ(IO-Link) ユーザーマニュアル

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