•
•
•
® FCM
IO-Link
SM-A19060/3
SM-358642
SM-A19060/3
i 2023-04-21
® FCM IO-Link
•
•
SM-A19060/3
ii 2023-04-21
ISO 4414JIS B 8370JFPS 2008()
3
SM-A19060/3
iii 2023-04-21
(
)
•
•
•
•
OFF
•
•
SM-A19060/3
iv 2023-04-21
()
FCM
050
(
OFF )
•
•
• ()
()
• JIS B 8392-12012(ISO 8573-12010)1:1:11:6:2
• ()
()()
()
<>
•
•
SM-A19060/3
v 2023-04-21
( OFF )
20°C1(101kPa) 65%RH
SM-A19060/3
vi 2023-04-21
.............................................................................................................................. i
............................................................................................... ii
.................................................................................................... iii
............................................................................................ iii
.................................................................................................... v
................................................................................................................................... vi
1. ..................................................................................................................... 1
1.1 .............................................................................................................. 1
1.1.1 ............................................................................................... 1
1.1.2 ...................................................................................... 2
1.1.3 ................................................................................................ 3
1.2 ..................................................................................................................... 4
1.2.1 ............................................................................................... 4
1.2.2 ...................................................................................... 7
1.3 .............................................................................................................. 9
1.3.1 General .......................................................................................................... 9
1.3.2 On demand data .......................................................................................... 10
1.3.3 Parameter and commands ...........................................................................11
1.3.4 Process data IN ........................................................................................... 15
1.3.5 Process data OUT ....................................................................................... 16
1.3.6 Observation ................................................................................................. 17
1.3.7 Diagnosis ..................................................................................................... 18
1.4 ............................................................................................................ 19
1.4.1 ........................................................................................... 19
1.4.2 .................................................................................. 20
1.5 ............................................................................................................ 23
1.5.1 ........................................................................... 25
2. ....................................................................................................................... 26
2.1 ............................................................................................................ 26
2.2 ............................................................................................................ 28
2.3 ............................................................................................................ 29
2.3.1 ................................................................................................... 29
2.3.2 ....................................................................................................... 29
2.3.3 ...................................................................................................... 29
2.3.4 .......................................................................................................... 30
2.4 ............................................................................................................ 31
2.4.1 M12 ................................................................................................. 33
2.4.2 ...................................................................................................... 34
3. ................................................................................................................... 35
3.1 ............................................................................................................ 37
3.1.1 ........................................................... 37
3.1.2 ............................................................ 40
3.1.3
() .......................................... 42
3.1.4 (IO-Link ) ....................... 43
SM-A19060/3
vii 2023-04-21
3.2 ............................................................................................................ 45
3.2.1 ........................................................................................ 45
3.2.2 ........................................................ 47
3.2.3 .................................................................................. 49
3.2.4 ON .............................................................. 50
3.3 ............................................................................................... 52
3.3.1 ................................................................................ 52
3.3.2 ............................................................................ 54
3.4 ......................................................................................................... 56
4. ............................................................................................... 63
4.1 .................................................................................. 63
4.2 ........................................................................................................ 65
5. ................................................................................................................... 66
5.1 ............................................................................................................ 66
5.2 ............................................................................................................ 66
SM-A19060/3 1.
1 2023-04-21
1.
1.1
1.1.1
FCM
9500
AI
-
H6
C
R
S
T
-
()
AI
AR
O2
LN
C1
C3
9500
00.5L/min
0001
01L/min
0002
02L/min
0005
05L/min
0010
010L/min
0020
020L/min
0050
050L/min
0100
0100L/min
()
L9500
(
)
00.5L/min
L0001
01L/min
L0001
02L/min
L0005
05L/min
L0010
010L/min
()
AI
AR
O2
()
LN
(13A)
C1
(CH4)
C3
(C3H8)
()
AI
AR
O2
LN
C1
C3
H6
(
6
)
( 50100L/min )
H8
(
8
)
8A
Rc1/4
UF 1
9/16-18UNF
()
C
IO-Link
()
R
() 2
S
()/() 3m
L
L()/() 3m
M
() 3m
() 2
B
() 2
T
K
1 9/16-18UNF 1.4
2 ()()()
()
()
()
()
()
FCM
MS3
-
MS3
()/() 3m
ML3
L()/() 3m
MM3
() 3m
LB1
B
FCM-0001AI-H8CRSBK
() 01L/min
()
()
(8)
() IO−Link
()
() ()
/()3m
()
()
()
()
()
SM-A19060/3 1.
2 2023-04-21
1.1.2
FCM-0002H2-8ACRSBK
() 02L/min
()
() Rc1/4
() IO-Link
()
() ()/()3m
()
()
H2
-
-
()
H2
HE
0002
02L/min
0005
05L/min
0010
010L/min
0020
020L/min
()
H2
HE
()
H2
HE
8A
Rc1/4
UF 1
9/16-18UNF
4S
1/4
2
4RM
1/4
JXR
()
C
IO-Link
()
R
() 2
S
()/() 3m
L
L()/() 3m
M
() 3m
() 2
B
() 2
T
K
1 9/16-18UNF 1.4
2 ()()()
()
()
()
()
()
()
FCM
MS3
-
MS3
()/() 3m
ML3
L()/() 3m
MM3
() 3m
LB1
0002
8A
C
R
S
B
T
FCM
()
()
SM-A19060/3 1.
3 2023-04-21
1.1.3
◼
FCM-LB1
◼ (M12 () / M12 ())
FCM-MS3
◼ (M12 L () / M12 ())
FCM-ML3
◼ (M12 ())
FCM-MM3
SM-A19060/3 1.
4 2023-04-21
1.2
1.2.1
FCM-[()][()]-[()]C
AI
()
AR
()
O2
()
LN
()
C1
()
C3
()
1
()
9500
500mL/min
0001
1L/min
0002
2L/min
0005
5L/min
0010
10L/min
0020
20L/min
0050
50L/min
0100
100L/min()
(
)
L9500
500mL/min
L0001
1L/min
L0002
2L/min
L0005
5L/min
L0010
10L/min
2
()
AI
AR
O2
()
LN
(13A)3
C1
(CH4 100%)
C3
(C3H8 100%)
()
H6
(6)
( 50100L/min
)
H8
(8)
8A
Rc1/4
UF
9/16-18UNF
3100%F. S.
()
95000020
±5%F.S.0.5sec (TYP)
00500100
±5%F.S.1sec (TYP)
3%F.S.
1%F.S.
0.2%F.S./(25)
98kPa 1%F.S.()
()
H6/H8
490kPa
8A/UF
980kPa
05090%RH ()
1 201(101kPa) 65%
2
JIS B8392-12012(ISO 8573-12010)111162
()()
( 10)( 0.1mg/m3)
3 13A LNG (CH4)88%
SM-A19060/3 1.
5 2023-04-21
FCM-[()][()]-[()]C
C
IO-Link
7 LED 3 1digit
DC24V10%( 1%)
4
200mA ( A)
()
H6/H8
8A/UF
()
H6/H8
200g
8A/UF
480g
IEC IP40
5
EMC
EN 55011EN 61000-6-2EN 61000-4-2/3/4/6/8
4 IO-Link
5
SM-A19060/3 1.
6 2023-04-21
◼
()
9500
0001
0002
0005
0010
0020
0050
0100
(
)
AI
(kPa)
50
100
100
100
100
150
200
300
(kPa)
20150
50200
50250
50250
50250
100300
150300
250350
(kPa)
150
200
250
250
250
300
300
350
AR
(kPa)
50
100
100
100
100
150
200
(kPa)
20150
50200
50250
50250
50250
100300
150300
(kPa)
150
200
250
250
250
300
300
O2
(kPa)
50
100
100
100
100
(kPa)
20150
50200
50250
50250
50250
(kPa)
150
200
250
250
250
LN/C1
(kPa)
50
50
50
50
50
(kPa)
20150
20150
20150
20150
30150
(kPa)
150
150
150
150
150
C3
(kPa)
50
50
50
50
50
(kPa)
20150
20150
20150
20150
30150
(kPa)
150
150
150
150
150
6 ()
7
()
◼
()
L9500
L0001
L0002
L0005
L0010
(
)
AI/O2
LN/C1
C3
8
(kPa)
20
20
20
20
20
(kPa)
550
550
550
550
1050
(kPa)
50
50
50
50
50
8 (12.5kPa)
◼
()
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010
0020
0050
0100
0500
mL/min
0.001.00
L/min
0.002.00
L/min
0.005.00
L/min
0.010.0
L/min
0.020.0
L/min
0.050.0
L/min
0100
L/min
1mL/min
0.01L/min
0.01L/min
0.01L/min
0.1L/min
0.1L/min
0.1L/min
1L/min
9
999999mL
9999.99L
9999.99L
9999.99L
99999.9L
99999.9L
99999.9L
999999L
1mL
0.01L
0.01L
0.01L
0.1L
0.1L
0.1L
1L
5mL
0.01L
0.02L
0.05L
0.1L
0.2L
0.5L
1L
9 () OFF
Process Data OUT 0
67
SM-A19060/3 1.
7 2023-04-21
1.2.2
FCM-[()][()]-[()]C
(H2)
(HE)
1
()
0002
2L/min
0005
5L/min
0010
10L/min
0020
20L/min
2
()
H2
HE
()
8A
Rc1/4
UF
9/16-18UNF
4S
1/4 2
4RM
1/4 JXR
3100%F.S.
±5%F.S.0.5sec (TYP)
3%F.S.
1%F.S.
0.2%F.S./(25)
98kPa 1%F.S.()
980kPa
05090%RH ()
3
110-6Pam3/s()
C
IO-Link
7 LED3 1digit
DC24V10%( 1%)
4
220mA ( A)
1 201(101kPa)
2
3
4 IO-Link
SM-A19060/3 1.
8 2023-04-21
FCM-[()][()]-[()]C
()
8A/UF
480g
4S/4RM
560g
IEC IP40
5
EMC
EN 55011EN 61000-6-2EN 61000-4-2/3/4/6/8
5
◼
()
0002
0005
0010
0020
(
)
H2
(kPa)
20
50
50
50
(kPa)
1050
3080
3080
3080
(kPa)
50
80
80
80
HE
(kPa)
50
100
100
100
(kPa)
20100
50150
50150
100150
(kPa)
100
150
150
150
6 ()
7
()
◼
()
0002
0005
0010
0020
0.002.00
L/min
0.005.00
L/min
0.010.0
L/min
0.020.0
L/min
0.01
L/min
0.01
L/min
0.1
L/min
0.1
L/min
8
9999.99L
9999.99L
99999.9L
99999.9L
0.01L
0.01L
0.1L
0.1L
0.02L
0.05L
0.1L
0.2L
8 () OFF
Process Data OUT 0
67
SM-A19060/3 1.
9 2023-04-21
1.3
1.3.1 General
◼ ID
ID
ID
Product ID
0x216001
FCM-9500-C
500mL/min
0x216002
FCM-0001-C
1L/min
0x216003
FCM-0002-C
2L/min
0x216004
FCM-0005-C
5L/min
0x216005
FCM-0010-C
10L/min
0x216006
FCM-0020-C
20L/min
0x216007
FCM-0050-C
50L/min
0x216008
FCM-0100-C
100L/min
IO-Link IODDhttps://www.ckd.co.jp/)
IO-Link
2ms
V1.1
1kbyte
COM3(230.4kbps)
SIO
A
ID
10byte
4byte
SM-A19060/3 1.
10 2023-04-21
1.3.2 On demand data
◼ Identification
ID855(10 )/ 357(16 )
0x0010
0
Vendor Name
CKD Corporation
R
64byte
String
0x0011
0
Vendor Text
https://www.ckd.co.jp/
R
64byte
String
0x0012
0
Product Name
FCM-0050-C
1
R
40byte
String
0x0013
0
Product ID
FCM-0050-C
1
R
64byte
String
0x0014
0
Product Text
Small Size Flow Controller
R
64byte
String
RapiFlow, 50L/min
1
0x0015
0
Serial- Number
-
2
R
16byte
String
0x0016
0
Hardware Revision
v1.0
1
R
64byte
String
0x0017
0
Firmware Revision
v2.0
1
R
64byte
String
0x0018
0
Application
Specific Tag
R/W
32byte
String
R
R/W/
1 50L/min
2 No.
ProcessData
ProcessData
FCM-(L)9500*-*C
0500
0500.0 (mL/min)
05000
0999999mL
0999999
FCM-(L)0001*-*C
01.00
0.001.000 (L/min)
01000
09999.99L
FCM-(L)0002*-*C
02.00
0.002.000 (L/min)
02000
FCM-(L)0005*-*C
05.00
0.005.000 (L/min)
05000
FCM-(L)0010*-*C
010.0
0.010.00 (L/min)
01000
099999.9L
FCM-0020*-*C
020.0
0.020.00 (L/min)
02000
FCM-0050*-*C
050.0
0.050.00 (L/min)
05000
FCM-0100*-*C
0100
0100.0 (L/min)
01000
0999999L
()
19
X10
Y11
Z12
0131
001999
SM-A19060/3 1.
11 2023-04-21
1.3.3 Parameter and commands
◼
0x0002
0
System Command
1
W
1byte
UInteger8
0x000C
0
Device Access Locks
0x0000
0x0001
0x0002
R/W
2byte
Record
0x0020
0
Error Count
0
R
2byte
UInteger16
0x0024
0
Device Status
0
R
1byte
UInteger8
0x0025
0
Detailed Devices Status
Diagnosis
R
33byte
Array of 3
Octetstring
R
W
R/W/
1
0x82
Restore Factory Settings
0xA0
Zero Adjust Start
0xA1
Zero Adjust Reset
SM-A19060/3 1.
12 2023-04-21
◼
0x0100
0
0AIR/ 1AR/ 2O2/ 3LN/
4CH4/ 5C3H8/
6H2/ 7He/
-
R
2byte
UInteger16
0x0101
0
1()
(Switch_Tolerance Mode)
ON/OFF
1ON
0OFF
R/W
2byte
UInteger16
0x0102
0
1()
(Switch_Tolerance Mode)
NO/NC
0NO(Normally Open)
1NC(Normally Close)
R/W
2byte
UInteger16
0x0103
0
1()
(Switch_Tolerance Mode)
0 %F.S.
-500%F.S.
R/W
2byte
Integer16
0x0104
0
1()
(Switch_Tolerance Mode)
0 %F.S.
050%F.S.
R/W
2byte
Integer16
0x0105
0
2()
(Switch_Designated Range Mode)
ON/OFF
1ON
0OFF
R/W
2byte
UInteger16
0x0106
0
2()
(Switch_Designated Range Mode)
NO/NC
0NO(Normally Open)
1NC(Normally Close)
R/W
2byte
UInteger16
0x0107
0
2()
(Switch_Designated Range Mode)
0 %F.S. 1
090%F.S.
R/W
2byte
UInteger16
0x0108
0
2()
(Switch_Designated Range Mode)
100 %F.S. 1
10100%F.S.
R/W
2byte
UInteger16
0x0109
0
3()
(Switch_Integarated Pulse)
ON/OFF
1ON
0OFF
R/W
2byte
UInteger16
0x010A
0
3()
(Switch_Integarated Pulse)
NO/NC
0NO(Normally Open)
1NC(Normally Close)
R/W
2byte
UInteger16
0x010B
0
4( ON)
(Switch_Integarated Flow)
ON/OFF
1ON
0OFF
R/W
2byte
UInteger16
0x010C
0
4( ON)
(Switch_Integarated Flow)
NO/NC
0NO(Normally Open)
1NC(Normally Close)
R/W
2byte
UInteger16
0x010D
0
4( ON)
(Switch_Integarated Flow)
0 L
2
R/W
4byte
UInteger32
0x010E
0
0OFF
1ON
R/W
2byte
UInteger16
0x010F
0
0 L
2
R/W
4byte
UInteger32
0x0110
0
0OFF
1
2
R/W
2byte
UInteger16
0x0111
0
20 %F.S.
5100%F.S.
R/W
2byte
UInteger16
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