2. CKD
  3. NS-QFSシリーズ

CKD NS-QFSシリーズ ユーザーマニュアル

  • こんにちは！私は、CKD NS-QFSシリーズ窒素ガス精製ユニット用流量センサの取扱説明書の内容を理解しています。このデバイスの取り付け方法、使用方法、各種設定、トラブルシューティングなどについて、ご質問にお答えします。お気軽にご質問ください。
  • 引火性ガスは使用できますか？
    商取引での使用は可能ですか？
    流量センサの精度をどのように確認しますか？
    エラー発生時の対処法は？
    清掃方法を教えてください。
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NS-QFS
SM-A30482
SM-A30482
i 2020-03-17
NS-QFS
•
•
SM-A30482
ii 2020-03-17
ISO 4414 JIS B 8370 JFPS 2008( )
3
SM-A30482
iii 2020-03-17
(
)
•
•
•
•
OFF
•
•
SM-A30482
iv 2020-03-17
5 50
2
SM-A30482
v 2020-03-17
20
°
C 1 (101kPa) 65%RH
SM-A30482
vi 2020-03-17
............................................................................................................................... i
............................................................................................... ii
................................................................................................... iii
............................................................................................ iii
.................................................................................................... v
................................................................................................................................... vi
1. ...................................................................................................................... 1
1.1 .............................................................................................................. 1
1.2 ...................................................................................................................... 2
1.3 .............................................................................................................. 3
1.4 ...................................................................................................................... 4
1.4.1 .............................................................................. 4
1.4.2 ..................................................................................................... 5
1.5 .............................................................................................................. 7
1.5.1 RUN ................................................................................... 7
1.5.2 SET ..................................................................................................... 8
1.5.3 ......................................................................................... 15
1.5.4 ........................................................................................... 16
2. ....................................................................................................................... 17
2.1 ............................................................................................................ 17
2.2 ............................................................................................................ 18
2.3 ............................................................................................................ 19
2.3.1 .................................................................................. 22
2.4 ............................................................................................... 24
3. .................................................................................................................... 25
4. ................................................................................................ 28
4.1 .................................................................................. 28
4.2 ........................................................................................................ 30
5. .................................................................................................................... 32
5.1 ............................................................................................................ 32
5.2 ............................................................................................................ 32
SM-A30482 1.
1 2020-03-17
1.
1.1
SM-A30482 1.
2 2020-03-17
1.2
SM-A30482 1.
3 2020-03-17
1.3
SM-A30482 1.
4 2020-03-17
1.4
1.4.1
SM-A30482 1.
5 2020-03-17
1.4.2
SET
RUN
7
SET
8
1 5 100
5 100
SM-A30482 1.
6 2020-03-17
15
16
SM-A30482 1.
7 2020-03-17
1.5
1.5.1 RUN
1
SM-A30482 1.
8 2020-03-17
1.5.2 SET
1
SM-A30482 1.
9 2020-03-17
F.01 CH1
CH1
SM-A30482 1.
10 2020-03-17
1
8
No. LCD
1
2 1
1 2
3 2
1 2
4 1
1 3
5 2
1 3
6 1
4
7 2
OFF
4
8
5 6
1 0 100%
2 1 2 1 8%FS
3 ON ON Hi Lo ON
4
5 1.2
6 1
40msec
5
SM-A30482 1.
11 2020-03-17
F.03
F.04
F.05
ON
F.07
LCD
SM-A30482 1.
12 2020-03-17
F.08 1
ANR NOR
ANR 20 1 65 RH
NOR 0 1 0 RH
F.09 2
2
L/min cf/h
F.10
0.25sec 1sec 3
F.11
0.05sec 1.50sec 7
SM-A30482 1.
13 2020-03-17
F.12
F.14
1
L
F.16
PIN
PIN
/