BRONKHORST EX-FLOW ユーザーマニュアル

タイプ
ユーザーマニュアル
取扱説明書
本質安全防爆型質量流量計(TIIS)
Doc. No: 9.17.090F Date: 02-02-2017
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3
1
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/
/
30
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1.1 ……………………………………………………………………………….
1.2 X100 ………………………….
2.1 …………………………………………………………………………….
2.2 …………………………………………………………………………….
2.3 ……………………………………………………………………………….
2.4 ……………………………………………………………………………………. 10
2.5 ………………………………………………………………. 11
2.6 ………………………………………………………………………………. 11
2.7 ……………………………………………………………………………………. 11
2.8 ………………………………………………………………………………. 11
2.9 ………………………………………………………………………………. 12
2.10 ………………………………………………………………………………. 12
2.11 ……………………………………………………………………….. 13
2.12 ………………………………………………………………………………….. 13
2.13 ……………………………………………………………………………….. 13
3.1 ……………………………………………………………………………………. 14
3.2 ………………………………………………………. 14
3.3 ………………………………………………………………………. 14
3.4 ……………………………………………………………………………. 14
4.1 …………………………………………………………………………………… 15.
4.2 ……………………………………………… 15
4.3 ………………………………………………………… 15
4.3.1 …………………………………………… 15
5.1 …………………………………………………………………………………… 16
5.2 …………………………………………………………………………………… 16
6.1 …………………………………………………………………………………… 17
6.2 ……………………………………………… 17
……………………………………………………………………………. 18
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1.1
700bar
0…5mln/min 1000m3n/h
1.2 X100
X100
Ex ib IIC T4
ib =
IIC = 20 J
T4 = 135
F-112AX
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1-3
28V
98mA
686mW
0.3mH
(1 - 3 ) 1nF
:
2008Ex
JNIOSH-TR-NO.43
15mA
15 20mA
IP65 TIIS IP20
周囲温度: -10℃~+70℃
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2.1
2.2
Declaration on Contamination
Form
2.3
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2.4
10bar
F-106/F-107
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2.5
2.6
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1
2.7
D
D
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2.8
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IP
( )
( )
(1, 3) ( ) AC500V 1
2.9
1.5
2 x 10E9mbarl/s He
2.10
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2.11
30
2.12
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2.13
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3.1
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3.2
OFF
30
3.3
3.4
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4.1
Bronkhorst
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Lapp Unitronic LiYCY 0034402 0.25sq
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4.2
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400
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Vdc
4.3 EMC
CE
EMC
EMC
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EMC
4.3.1
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5.1
.2
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.1
6.2
1a)
1b)
1c)
1d)
1f)
/ 1g)
2a)
/ 2b)
/ 3a)
/
3b)
/
3c) /
NH3,
C3H8, C4H10, etc
4a)
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BRONKHORST EX-FLOW ユーザーマニュアル

タイプ
ユーザーマニュアル